Fabrication and mechanical testing of glass chips for high-pressure synthetic or analytical chemistry
暂无分享,去创建一个
J. G. E. Gardeniers | R. E. Oosterbroek | F. Benito-Lopez | D. Reinhoudt | W. Verboom | A. Berg | J. Gardeniers | F. Benito‐Lopez | D. Hermes | D. C. Hermes | M. Kakuta | W. Verboom | D. N. Reinhoudt | A. van den. Berg | M. Kakuta
[1] A. Plößl. Wafer direct bonding: tailoring adhesion between brittle materials , 1999 .
[2] Klavs F. Jensen,et al. Design issues for membrane-based, gas phase microchemical systems , 2000 .
[3] Albert van den Berg,et al. Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors , 2001 .
[4] A. Berg,et al. Etching technology for chromatography microchannels , 1997 .
[5] G. Kissinger,et al. Hydrophilicity of Silicon Wafers for Direct Bonding , 1991 .
[6] H. Löwe,et al. Chemistry in microstructured reactors. , 2004, Angewandte Chemie.
[7] U. Gösele,et al. Low temperature silicon direct bonding for application in micromechanics : bonding energies for different combinations of oxides , 1998 .
[8] H. J. Ligthart,et al. Glass and glass machining in Zeus panels , 1996 .