Suscepter assembly in atomic layer deposition apparatus

A susceptor assembly for atomic layer deposition equipment is provided to facilitate the temperature control of a susceptor by forming a heat and the susceptor in one body. A susceptor assembly for atomic layer deposition equipment comprises a housing(113), a supporting plate(111), a heat generating unit(121), a supporting unit(123) and a terminal. The supporting plate is located on the top of the housing. A plurality of wafers are settled on the supporting plate. The heat generating unit is placed inside the housing. The heat generating unit generates heat when the power is applied. The heat generating unit has a wire or filament shape. The supporting unit is positioned below the heat generating unit. The supporting unit supports the heat generating unit. The terminal applies the power to the heat generating unit.