Xsim: unified regional approach to compact modeling for next generation CMOS

This paper describes the approaches in the development of Xsim, a unified regional threshold-voltage-based model for deep-submicron MOSFETs. In comparison to popular surface-potential-based models, our approach has the advantages of correlation to technology data, minimum data and one-iteration extraction, single-piece charge models from accumulation to strong inversion with extendibilily to poly-depletion and strained-Si, as well as selectable accuracy with the same parameter set.

[1]  C. Sah,et al.  Effects of diffusion current on characteristics of metal-oxide (insulator)-semiconductor transistors☆ , 1966 .

[2]  Xing Zhou,et al.  A new "critical-current at linear-threshold" method for direct extraction of deep-submicron MOSFET effective channel length , 1999 .

[3]  Carlos Galup-Montoro,et al.  An explicit physical model for the long-channel MOS transistor including small-signal parameters , 1995 .

[4]  E. Vittoz,et al.  An analytical MOS transistor model valid in all regions of operation and dedicated to low-voltage and low-current applications , 1995 .

[5]  H. Gummel,et al.  Inversion charge modeling , 2001 .

[6]  Xing Zhou,et al.  A simple and unambiguous definition of threshold voltage and its implications in deep-submicron MOS device modeling , 1999 .

[7]  C. C. McAndrew,et al.  Accuracy of approximations in MOSFET charge models , 2002 .

[8]  Xing Zhou,et al.  De-embedding length-dependent edge-leakage current in shallow trench isolation submicron MOSFETs , 2002 .

[9]  Xing Zhou,et al.  Threshold voltage definition and extraction for deep-submicron MOSFETs , 2001 .

[10]  K. Y. Lim,et al.  A general approach to compact threshold voltage formulation based on 2D numerical simulation and experimental correlation for deep-submicron ULSI technology development [CMOS] , 2000 .

[11]  X. Zhou,et al.  An analytical effective channel-length modulation model for velocity overshoot in submicron MOSFETs based on energy-balance formulation , 2002, Microelectron. Reliab..

[12]  Xing Zhou,et al.  Unified MOSFET compact I-V model formulation through physics-based effective transformation , 2001 .

[13]  K. Y. Lim,et al.  A physically-based semi-empirical series resistance model for deep-submicron MOSFET I-V modeling , 2000 .

[14]  J. Brews A charge-sheet model of the MOSFET , 1978 .