3-D Optical Metrology of Finite sub-20 nm Dense Arrays using Fourier Domain Normalization | NIST

• Each point at the conjugate back focal plane maps to a plane wave of illumination at the sample. • Scanning or fixed aperture allows selection of incident angles. • Polarization states can be defined at the CBFP with respect to the sample and imaging optics. We use the scatterfield microscope with high magnification imaging optics to enable spatial selectivity in both angle-resolved and focus-resolved modes.