Static Force Measurement Using Piezoelectric Sensors

In force measurement applications, a piezoelectric force sensor is one of the most popular sensors due to its advantages of low cost, linear response, and high sensitivity. Piezoelectric sensors effectively convert dynamic forces to electrical signals by the direct piezoelectric effect, but their use has been limited in measuring static forces due to the easily neutralized surface charge. To overcome this shortcoming, several static (either pure static or quasistatic) force sensing techniques using piezoelectric materials have been developed utilizing several unique parameters rather than just the surface charge produced by an applied force. The parameters for static force measurement include the resonance frequency, electrical impedance, decay time constant, and capacitance. In this review, we discuss the detailed mechanism of these piezoelectric-type, static force sensing methods that use more than the direct piezoelectric effect. We also highlight the challenges and potentials of each method for static force sensing applications.

[1]  Takayuki Nakata,et al.  Effective contact method without lateral inhibition in virtual force perception device , 2018, 2018 International Workshop on Advanced Image Technology (IWAIT).

[2]  Maria Prudenziati,et al.  Resonant pressure sensor based on piezoelectric properties of ferroelectric thick films , 1992 .

[3]  Mi-Ching Tsai,et al.  Static force measurement for automation assembly systems , 2012 .

[4]  Emiliano Schena,et al.  Microfabricated Tactile Sensors for Biomedical Applications: A Review , 2014, Biosensors.

[5]  Wan-Jung Chang,et al.  Real-Time Monitoring via Patch-Type Piezoelectric Force Sensors for Internet of Things Based Logistics , 2017, IEEE Sensors Journal.

[6]  Satoyuki Kawano,et al.  Development of piezoelectric acoustic sensor with frequency selectivity for artificial cochlea , 2010 .

[7]  Qifa Zhou,et al.  A Novel Ultrasound Technique for Non-Invasive Assessment of Cell Differentiation , 2016, IEEE Sensors Journal.

[8]  Xiaoning Jiang,et al.  Design, fabrication and characterization of high temperature piezoelectric vibration sensor using YCOB crystals , 2012 .

[9]  C. Randall,et al.  Elastic, piezoelectric, and dielectric characterization of modified BiScO/sub 3/-PbTiO/sub 3/ ceramics , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[10]  R. Paparella,et al.  Static Absolute Force Measurement for Preloaded Piezoelements Used for Active Lorentz Force Detuning System , 2004 .

[11]  A. Napieralski,et al.  Measurement of static force at liquid helium temperature , 2007 .

[12]  Sungchul Kang,et al.  A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor , 2014, Sensors.

[13]  Hyonyoung Han,et al.  Active muscle stiffness sensor based on piezoelectric resonance for muscle contraction estimation , 2013 .

[14]  Bradley J. Nelson,et al.  A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives , 2002 .

[15]  Xiaotang Hu,et al.  Piezoelectric microelectromechanical resonant sensors for chemical and biological detection. , 2012, Lab on a chip.

[16]  Kyung-Soo Kim,et al.  Design of a miniature force sensor based on photointerrupter for robotic hand , 2018 .

[17]  Thomas R. Shrout,et al.  Manganese-modified BiScO3–PbTiO3 piezoelectric ceramic for high-temperature shear mode sensor , 2005 .

[18]  N. Xi,et al.  A high sensitivity force sensor for microassembly: design and experiments , 2003, Proceedings 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2003).

[19]  J.-i. Yuji,et al.  A PVDF Tactile Sensor for Static Contact Force and Contact Temperature , 2006, 2006 5th IEEE Conference on Sensors.

[20]  S. Biehl,et al.  Micro force sensor with piezoresistive amorphous carbon strain gauge , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[21]  K. Rajanna,et al.  Tactile sensor based on piezoelectric resonance , 2002, Proceedings of IEEE Sensors.

[22]  M. Fouaidy CHARACTERIZATION OF PIEZOELECTRIC ACTUATORS USED FOR SRF CAVITIES ACTIVE TUNING AT LOW TEMPERATURE , 2010 .

[23]  Eduardo Bayo,et al.  Six-axis force sensor evaluation and a new type of optimal frame truss design for robotic applications , 1989, J. Field Robotics.

[24]  E. Benes,et al.  Sensors based on piezoelectric resonators , 1995 .

[25]  E. Benes,et al.  Viscosity sensor utilizing a piezoelectric thickness shear sandwich resonator , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[26]  Peihua Zhang,et al.  A flexible piezoelectric force sensor based on PVDF fabrics , 2011 .

[27]  Shujun Zhang,et al.  Piezoelectric Materials for High Temperature Sensors , 2011 .

[28]  Shinichi Hirai,et al.  Elastic Model of Deformable Fingertip for Soft-Fingered Manipulation , 2006, IEEE Transactions on Robotics.

[29]  Xiaoning Jiang,et al.  Relaxor-PT Single Crystal Piezoelectric Sensors , 2014 .

[30]  G. De Maria,et al.  Force/tactile sensor for robotic applications , 2012 .

[31]  Y. Bernard,et al.  Static force transducer based on resonant piezoelectric structure: root cause investigation , 2017 .

[32]  Yong Zhu,et al.  Piezoelectric Floating Element Shear Stress Sensor for the Wind Tunnel Flow Measurement , 2017, IEEE Transactions on Industrial Electronics.

[33]  W. A. Groen,et al.  Development of temperature stable charge based piezoelectric composite quasi-static pressure sensors , 2010 .

[34]  Kazuo Tanie,et al.  A force display system for virtual environments and its evaluation , 1992, [1992] Proceedings IEEE International Workshop on Robot and Human Communication.

[35]  The piezoelectric effect of GaAs used for resonators and resonant sensors , 1994 .

[36]  Taku Hachisu,et al.  VacuumTouch: attractive force feedback interface for haptic interactive surface using air suction , 2014, CHI.

[37]  Fu-Kuo Chang,et al.  Static Tactile Sensing for a Robotic Electronic Skin via an Electromechanical Impedance-Based Approach , 2020, Sensors.

[38]  Mona E. Zaghloul,et al.  Highly Sensitive Wearable Piezoelectric Force Sensor With Quasi-Static Load Testing , 2018, IEEE Sensors Journal.

[39]  Jeff Weber,et al.  Domo: a force sensing humanoid robot for manipulation research , 2004, 4th IEEE/RAS International Conference on Humanoid Robots, 2004..

[40]  Ping Yu,et al.  Flexible Piezoelectric Tactile Sensor Array for Dynamic Three-Axis Force Measurement , 2016, Sensors.

[41]  Michael D. Ward,et al.  Piezoelectric pH sensors: AT-cut quartz resonators with amphoteric polymer films , 1993 .

[42]  Pablo González de Santos,et al.  Accurate modeling of low-cost piezoresistive force sensors for haptic interfaces , 2010, 2010 IEEE International Conference on Robotics and Automation.

[43]  Yiting Fei,et al.  High-temperature piezoelectric single crystal ReCa4O(BO3)3 for sensor applications , 2008, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[44]  Zheng Wang,et al.  A Finger-Shaped Tactile Sensor for Fabric Surfaces Evaluation by 2-Dimensional Active Sliding Touch , 2014, Sensors.

[45]  Cato T. Laurencin,et al.  Biodegradable Piezoelectric Force Sensor , 2018, Proceedings of the National Academy of Sciences.

[46]  Hiroshi Ishiguro,et al.  Design and development of a low power Tactile Multi-Sensor Network for robotic systems , 2014, 2014 IEEE International Conference on Mechatronics and Automation.

[47]  U. Schmid,et al.  Piezoelectric MEMS resonator-based oscillator for density and viscosity sensing , 2014 .

[48]  Bernard Bayle,et al.  Modeling and Evaluation of Low-Cost Force Sensors , 2011, IEEE Transactions on Robotics.

[49]  Nigel H. Lovell,et al.  A review of tactile sensing technologies with applications in biomedical engineering , 2012 .

[50]  Xiaoning Jiang,et al.  Surface load induced electrical impedance shift in relaxor-PbTiO3 crystal piezoelectric resonators , 2012 .

[51]  Wei Pang,et al.  Femtogram mass sensing platform based on lateral extensional mode piezoelectric resonator , 2006 .

[52]  F. Gao,et al.  Methyl matters: An autonomic rapid self-healing supramolecular poly(N-methacryloyl glycinamide) hydrogel , 2017 .

[53]  Javad Dargahi,et al.  Design and microfabrication of a hybrid piezoelectric‐capacitive tactile sensor , 2006 .

[54]  Qingsong Xu,et al.  An overview of micro-force sensing techniques , 2015 .

[55]  Doron Shmilovitz,et al.  Static force measurement by piezoelectric sensors , 2006, 2006 IEEE International Symposium on Circuits and Systems.

[56]  Imad H. Elhajj,et al.  A 2-D PVDF force sensing system for micro-manipulation and micro-assembly , 2002, Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292).

[57]  Xiaoning Jiang,et al.  Surface acoustic load sensing using a face-shear PIN-PMN-PT single-crystal resonator , 2012, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[58]  Bernard Bayle,et al.  Design, development and preliminary assessment of a force sensor for robotized medical applications , 2014, 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.

[59]  Guang-Zhong Yang,et al.  Miniaturized Piezo Force Sensor for a Medical Catheter and Implantable Device , 2020, ACS applied electronic materials.

[60]  Claudine Gehin,et al.  Resonant force sensor using a PLL electronic , 2003 .

[61]  Xiaoning Jiang,et al.  YCa4O(BO3)3 (YCOB) high temperature vibration sensor , 2011 .

[62]  Kazuhisa Yanagisawa,et al.  Tactile sensor using piezoelectric resonator , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[63]  M. F. Barsky,et al.  Robot gripper control system using PVDF piezoelectric sensors , 1989, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[64]  Xuecang Geng,et al.  Advantages and Challenges of Relaxor-PbTiO3 Ferroelectric Crystals for Electroacoustic Transducers- A Review. , 2015, Progress in materials science.

[65]  Philippe Lutz,et al.  Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications , 2014 .

[66]  Jinwook Kim,et al.  A Face-Shear Mode Piezoelectric Array Sensor for Elasticity and Force Measurement , 2020, Sensors.

[67]  Joseph Johnson,et al.  High-Temperature Piezoelectric Sensing , 2013, Sensors.

[68]  Christine Barthod,et al.  Design and characterisation of a new force resonant sensor , 2000 .