论文信息 - Characteristics of IGZO TFT Prepared by Atmospheric Pressure Plasma Jet Using PE-ALD $\hbox{Al}_{2}\hbox{O}_{3}$ Gate Dielectric - 字舞流文

Characteristics of IGZO TFT Prepared by Atmospheric Pressure Plasma Jet Using PE-ALD $\hbox{Al}_{2}\hbox{O}_{3}$ Gate Dielectric

Chien-Hung Wu | Kow-Ming Chang | I. Deng | Chia-Chiang Chang | Chin-Jyi Wu | W. Chiang | Sung-Hung Huang