Pulsed Laser Deposition of ZnO-Based Thin Films

[1]  Hideomi Koinuma,et al.  High throughput fabrication of transition-metal-doped epitaxial ZnO thin films: A series of oxide-diluted magnetic semiconductors and their properties , 2001 .

[2]  K. Harshavardhan,et al.  Parameters that control pulsed electron beam ablation of materials and film deposition processes , 2003 .

[3]  I. Krestnikov,et al.  Identification of bound exciton complexes in ZnO , 2004 .

[4]  J. Sann,et al.  Properties of phosphorus doped ZnO , 2007 .

[5]  David R. Clarke,et al.  Optical absorption edge of ZnO thin films: The effect of substrate , 1997 .

[6]  M. Grundmann,et al.  MgxZn1−xO(0⩽x<0.2) nanowire arrays on sapphire grown by high-pressure pulsed-laser deposition , 2005 .

[7]  S. Ogale.  Thin films and heterostructures for oxide electronics , 2005 .

[8]  T. Venkatesan,et al.  Realization of band gap above 5.0 eV in metastable cubic-phase MgxZn1−xO alloy films , 2002 .

[9]  M. Grundmann,et al.  Lateral homogeneity of Schottky contacts on n-type ZnO , 2004 .

[10]  Charles M. Lieber,et al.  A laser ablation method for the synthesis of crystalline semiconductor nanowires , 1998, Science.

[11]  Ernst-Wolfgang Kreutz,et al.  Pulsed laser deposition of ceramics – fundamentals and applications , 1998 .

[12]  T. S. Lee,et al.  Properties of arsenic-doped p-type ZnO grown by hybrid beam deposition , 2003 .

[13]  Marius Grundmann,et al.  Optical and electrical properties of epitaxial (Mg,Cd)xZn1−xO, ZnO, and ZnO:(Ga,Al) thin films on c-plane sapphire grown by pulsed laser deposition , 2003 .

[14]  William W. Moses,et al.  Current trends in scintillator detectors and materials , 2002 .

[15]  M. Grundmann,et al.  Electrical properties of ZnO thin films and optical properties of ZnO-based nanostructures , 2005 .

[16]  J. Zúñiga-Pérez,et al.  Structural characterization of a-plane Zn1−xCdxO (0 < x <0.085) thin films grown by metal-organic vapor phase epitaxy. , 2006 .

[17]  V. N. Kulkarni,et al.  Wide Band Gap ZnO and ZnMgO Heterostructures for Future Optoelectronic Devices , 2005 .

[18]  Yoshiki Nakata,et al.  Synthesis of ZnO Nanorods by Nanoparticle Assisted Pulsed-Laser Deposition , 2003 .

[19]  David C. Look,et al.  P‐type doping and devices based on ZnO , 2004 .

[20]  T. Kawai,et al.  Fabrication and Optoelectronic Properties of a Transparent ZnO Homostructural Light-Emitting Diode , 2001 .

[21]  Qingyu Xu,et al.  Magnetoresistance in pulsed laser deposited 3d transition metal doped ZnO films , 2006 .

[22]  Hideo Hosono,et al.  Fabrication and photoresponse of a pn-heterojunction diode composed of transparent oxide semiconductors, p-NiO and n-ZnO , 2003 .

[23]  H. Morkoç,et al.  A COMPREHENSIVE REVIEW OF ZNO MATERIALS AND DEVICES , 2005 .

[24]  T. Chikyow,et al.  Blue and ultraviolet cathodoluminescence from Mn-doped epitaxial ZnO thin films , 2003 .

[25]  Masanobu Kusunoki,et al.  High-quality Y-Ba-Cu-O thin films by PLD-ready for market applications , 2001 .

[26]  O. Albert,et al.  Comparison between ZnO films grown by femtosecond and nanosecond laser ablation , 2002 .

[27]  R. Poprawe,et al.  Dynamik der Schichtabscheidung von Keramiken mit KrF-Excimer-Laserstrahlung , 2001 .

[28]  Mathias Schubert,et al.  Raman scattering in ZnO thin films doped with Fe, Sb, Al, Ga, and Li , 2003 .

[29]  P. Sakthivel,et al.  Evidence for the physical basis and universality of the elimination of particulates using dual-laser ablation. I. Dynamic time-resolved target melt studies, and film growth of Y2O3 and ZnO , 2002 .

[30]  Rectifying semiconductor-ferroelectric polarization loops and offsets in Pt–BaTiO3–ZnO–Pt thin film capacitor structures , 2005 .

[31]  J. Muth,et al.  Excitonic structure and absorption coefficient measurements of ZnO single crystal epitaxial films deposited by pulsed laser deposition , 1999 .

[32]  UV optical properties of ferromagnetic Mn-doped ZnO thin films grown by PLD , 2005 .

[33]  Marius Grundmann,et al.  Weak ferromagnetism in textured Zn1−x(TM)xO thin films , 2006 .

[34]  D. Bäuerle.  Laser Processing and Chemistry , 1996 .

[35]  David P. Norton,et al.  Dilute magnetic semiconducting oxides , 2004 .

[36]  Continuous compositional-spread technique based on pulsed-laser deposition and applied to the growth of epitaxial films , 2001, cond-mat/0104157.

[37]  David P. Norton,et al.  Transport properties of phosphorus-doped ZnO thin films , 2003 .

[38]  大友 明.  High-mobility electronic transport in ZnO thin films , 2006 .

[39]  M. Schubert,et al.  Infrared dielectric function and phonon modes of Mg-rich cubic MgxZn1−xO(x⩾0.67) thin films on sapphire (0001) , 2004 .

[40]  Marius Grundmann,et al.  Mean barrier height of Pd Schottky contacts on ZnO thin films , 2006 .

[41]  Masashi Kawasaki,et al.  Quantum Hall Effect in Polar Oxide Heterostructures , 2007, Science.

[42]  C. Lewis,et al.  Three-dimensional number density mapping in the plume of a low-temperature laser-ablated magnesium plasma , 1998 .

[43]  M. Klintenberg,et al.  The Quest for the Ideal Inorganic Scintillator , 2002 .

[44]  Mathias Schubert,et al.  Low temperature photoluminescence and infrared dielectric functions of pulsed laser deposited ZnO thin films on silicon , 2006 .

[45]  M. Schilling,et al.  Epitaxial properties of Al-doped ZnO thin films grown by pulsed laser deposition onSrTiO3(001) , 2005 .

[46]  M. Lorenz,et al.  On the phase formation of laser deposited Bi-Sr-Ca-Cu-O films on MgO, ZrO2 and silicon with YSZ buffer layers , 1991 .

[47]  H. Koinuma,et al.  Effect of MgZnO-layer capping on optical properties of ZnO epitaxial layers , 2002 .

[48]  H. Schmidt,et al.  EPR study on magnetic Zn1−xMnxO , 2005 .

[49]  E. Bellingeri,et al.  Deposition of ZnO thin films on SrTiO3 single-crystal substrates and field effect experiments , 2005 .

[50]  H. Börner,et al.  Large‐area double‐side pulsed laser deposition of YBa2Cu3O7−x thin films on 3‐in. sapphire wafers , 1996 .

[51]  H. Koinuma,et al.  Compact laser molecular beam epitaxy system using laser heating of substrate for oxide film growth , 1999 .

[52]  Marius Grundmann,et al.  High electron mobility of epitaxial ZnO thin films on c-plane sapphire grown by multistep pulsed-laser deposition , 2003 .

[53]  H. Niino,et al.  Plume dynamics in ZnO under ArF laser radiation , 2002 .

[54]  E. Kaldis.  Current Topics in Materials Science , 1980 .

[55]  R. Stroud,et al.  Pulsed laser deposition as a materials research tool , 1998 .

[56]  M. Schubert,et al.  Temperature-dependent dielectric and electro-optic properties of a ZnO-BaTiO3-ZnO heterostructure grown by pulsed-laser deposition , 2005 .

[57]  Marius Grundmann,et al.  Dielectric functions (1 to 5 eV) of wurtzite MgXZn1 -XO (x≤0.29) thin films , 2003 .

[58]  Qingyu Xu,et al.  Metal-insulator transition in Co-doped ZnO : Magnetotransport properties , 2006 .

[59]  Akira Ohtomo,et al.  Pulsed laser deposition of thin films and superlattices based on ZnO , 2005 .

[60]  K.H.J. Buschow,et al.  Encyclopedia of Materials: Science and Technology , 2004 .

[61]  R. Leuchtner.  Mass spectrometry and photoionization studies of the ablation of ZnO: ions, neutrals, and Rydbergs , 1998 .

[62]  H. Schmidt,et al.  Donor-like defects in ZnO substrate materials and ZnO thin films , 2007 .

[63]  Luis Vázquez,et al.  Growth evolution of ZnO films deposited by pulsed laser ablation , 2001 .

[64]  Takafumi Yao,et al.  Plasma assisted molecular beam epitaxy of ZnO on c -plane sapphire: Growth and characterization , 1998 .

[65]  H. Schmidt,et al.  Donor Levels in ZnO , 2006 .

[66]  D. Look,et al.  Oxygen pressure-tuned epitaxy and optoelectronic properties of laser-deposited ZnO films on sapphire , 1999 .

[67]  J. Perrière,et al.  Epitaxial growth of ZnO films , 2003 .

[68]  Hoi Sing Kwok,et al.  OPTICAL PROPERTIES OF EPITAXIALLY GROWN ZINC OXIDE FILMS ON SAPPHIRE BY PULSED LASER DEPOSITION , 1999 .

[69]  H. Schmidt,et al.  Room-temperature cathodoluminescence of n-type ZnO thin films grown by pulsed laser deposition in N2, N2O, and O2 background gas , 2005 .

[70]  H. Schmidt,et al.  Electron paramagnetic resonance of Zn 1 − x Mn x O thin films and single crystals , 2005 .

[71]  T. Venkatesan,et al.  Recent Advances in the Deposition of Multi-Component Oxide Films by Pulsed Energy Deposition , 2005 .

[72]  T. Butz,et al.  Infrared dielectric functions and phonon modes of wurtzite MgxZn1−xO (x⩽0.2) , 2002 .

[73]  M. Schubert,et al.  Refractive indices and band-gap properties of rocksalt MgxZn1−xO (0.68⩽x⩽1) , 2006 .

[74]  E. Bellingeri,et al.  High mobility in ZnO thin films deposited on perovskite substrates with a low temperature nucleation layer , 2005 .

[75]  Jürgen Christen,et al.  Bound exciton and donor–acceptor pair recombinations in ZnO , 2004 .

[76]  Ning Wang,et al.  Morphology of Si nanowires synthesized by high-temperature laser ablation , 1999 .

[77]  Robert P. H. Chang,et al.  Self-assembly of well-aligned gallium-doped zinc oxide nanorods , 2003 .

[78]  D. Spemann,et al.  Optical and structural properties of MgZnO/ZnO hetero- and double heterostructures grown by pulsed laser deposition , 2007 .

[79]  Wavelength Dependence of Femtosecond Pulsed Laser Deposition of Zinc Oxide Films , 2001 .

[80]  I. Takeuchi.  Combinatorial Synthesis of Functional Metal Oxide Thin Films , 2005 .

[81]  S. Ogale,et al.  On the origin of high-temperature ferromagnetism in the low-temperature-processed Mn–Zn–O system , 2004, Nature materials.

[82]  M. Lorenz,et al.  Pulsed-laser deposition and characterization of ZnO nanowires with regular lateral arrangement , 2007 .

[83]  H. Schmidt,et al.  Cathodoluminescence of large-area PLD grown ZnO thin films measured in transmission and reflection , 2007 .

[84]  C. Choy,et al.  Microstructure of compositionally-graded (Ba1−xSrx)TiO3 thin films epitaxially grown on La0.5Sr0.5CoO3-covered (100) LaAlO3 substrates by pulsed laser deposition , 2005 .

[85]  M. Grundmann,et al.  a-Si/SiOx Bragg-reflectors on micro-structured InP , 2005 .

[86]  H. Koinuma,et al.  Lateral grain size and electron mobility in ZnO epitaxial films grown on sapphire substrates , 2000 .

[87]  Michael G. Spencer,et al.  Heteroepitaxy of ZnO on GaN and its implications for fabrication of hybrid optoelectronic devices , 1998 .

[88]  Sang Yeol Lee,et al.  Fabrication of ZnO thin film diode using laser annealing , 2005 .

[89]  UV VUV spectroscopic ellipsometry of ternary MgxZn1-xO (0≤x≤0.53) thin films , 2004 .

[90]  M. Yoshimoto,et al.  Characteristics of polarity-controlled ZnO films fabricated using the homoepitaxy technique , 2004 .

[91]  G. Hubler,et al.  Pulsed Laser Deposition of Thin Films , 2003, Handbook of Laser Technology and Applications.

[92]  T. Butz,et al.  Ion beam analysis of epitaxial (Mg, Cd)xZn1 xO and ZnO:(Li, Al, Ga, Sb) thin films grown on c-plane sapphire , 2004 .

[93]  J. Lisoni,et al.  Off-axis pulsed laser deposition system for epitaxial oxide growth on substrates up to 2 inches in diameter , 1999 .

[94]  C. Lewis,et al.  Electron number density measurements in magnesium laser produced plumes , 1998 .