5C-5 High Frequency Piezo Composites Microfabricated Ultrasound Transducers for Intravascular Imaging (Invited)

High frequency ultrasound has been widely used for various applications in ophthalmology, dermatology, small animal studies and intravascular (IVUS) imaging as diagnosis and imaging tool. The research and development of high frequency transducer has become one of the most interesting areas in ultrasound technologies. This article briefly reviews the existing technologies for high frequency ultrasound transducer development, then, presents the state-of-the-art piezo composite microfabricated ultrasound transducer (PC-MUT) for the first time. Using this technology, PMN-PT single crystal 1-3 composite has been developed, of which the kerf width is as small as to ~ 4 mum. High frequency (> 40MHz) transducer with advanced performance has been developed for the IVUS application. The bandwidth and sensitivity are almost doubled compared with the conventional ceramic transducer. The features of PC-MUT technology may lead to great imaging quality and more potential medical applications

[1]  M. Sayer,et al.  Single element and linear array PZT ultrasound biomicroscopy transducers , 1997, 1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118).

[2]  Marc Lukacs,et al.  Emerging technologies for ferroelectric films and coatings , 1997 .

[3]  F. Foster,et al.  A history of medical and biological imaging with polyvinylidene fluoride (PVDF) transducers , 2000, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[4]  S.W. Smith,et al.  Thick film sol gel PZT transducer using dip coating , 2000, 2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121).

[5]  Qifa Zhou,et al.  Development of a high frequency (35 MHz) linear ultrasonic array using 2-2 composite elements [biomedical applications] , 2004 .

[6]  K. Shung,et al.  A 30-MHz piezo-composite ultrasound array for medical imaging applications , 2002, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[7]  Ruibin Liu,et al.  Interdigital Pair Bonding for High Frequency , 2001 .

[8]  X. Geng,et al.  5I-1 Microfabrication of Piezoelectric Composite Ultrasound Transducers (PC-MUT) , 2006, 2006 IEEE Ultrasonics Symposium.

[9]  S. Cochran,et al.  Net-shape ceramic processing as a route to ultrafine scale 1-3 connectivity piezoelectric ceramic-polymer composite transducers , 2004, IEEE Ultrasonics Symposium, 2004.

[10]  F. S. Foster,et al.  Beyond 30 MHz [applications of high-frequency ultrasound imaging] , 1996 .

[11]  F. Foster,et al.  Interdigital pair bonding for high frequency (20-50 MHz) ultrasonic composite transducers , 2001, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[12]  B. Auld,et al.  Modeling 1-3 composite piezoelectrics: thickness-mode oscillations , 1991, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[13]  Kevin A. Snook,et al.  2-2 PZT-polymer composites for high frequency (>20 MHz) ultrasound transducers , 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..

[14]  M. Watt,et al.  Fabrication of PZT sol gel composite ultrasonic transducers using batch fabrication micromolding , 2006, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[15]  M. Sayer Piezoelectric films and coatings , 1996 .

[16]  Wenwu Cao,et al.  Electromechanical coupling coefficient of an ultrasonic array element , 2006 .

[17]  M. Lukacs,et al.  Single element high frequency (<50 MHz) PZT sol gel composite ultrasound transducers , 2000, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[18]  Q.F. Zhou,et al.  Fabrication of sol-gel modified piezoelectric thick films for high frequency ultrasonic applications , 2004, IEEE Ultrasonics Symposium, 2004.