A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings

Presented here is a slotted-quad-beam structure sensor for the measurement of friction in micro bearings. Stress concentration slots are incorporated into a conventional quad-beam structure to improve the sensitivity of force measurements. The performance comparison between the quad-beam structure sensor and the slotted-quad-beam structure sensor are performed by theoretical modeling and finite element (FE) analysis. A hollow stainless steel probe is attached to the mesa of the sensor chip by a tailor-made organic glass fixture. Concerning the overload protection of the fragile beams, a glass wafer is bonded onto the bottom of sensor chip to limit the displacement of the mesa. The calibration of the packaged device is experimentally performed by a tri-dimensional positioning stage, a precision piezoelectric ceramic and an electronic analytical balance, which indicates its favorable sensitivity and overload protection. To verify the potential of the proposed sensor being applied in micro friction measurement, a measurement platform is established. The output of the sensor reflects the friction of bearing resulting from dry friction and solid lubrication. The results accord with the theoretical modeling and demonstrate that the sensor has the potential application in measuring the micro friction force under stable stage in MEMS machines.

[1]  Taesung Kim,et al.  An evaluation of the optical fiber beam as a force sensor , 2009 .

[3]  Ke-Qin Zhu,et al.  Effects of the slip velocity boundary condition on the characteristics of microbearings , 2004 .

[4]  F. F. Ling,et al.  Tribological Study of Microbearings for MEMS Applications , 2005 .

[5]  Gianluca Palli,et al.  A miniaturized optical force sensor for tendon-driven mechatronic systems: Design and experimental evaluation , 2012 .

[6]  D. Gould,et al.  A sensor for needle puncture force measurement during interventional radiological procedures. , 2013, Medical engineering & physics.

[7]  Jyh-Cheng Yu,et al.  Modeling analysis of a triaxial microaccelerometer with piezoelectric thin-film sensing using energy method , 2010, 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP).

[8]  Libo Zhao,et al.  Multilayer graphene sheets assembled by Langmuir-Blodgett fro tribology application , 2012, 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO).

[9]  R. Ghodssi,et al.  Dynamic Friction and Wear in a Planar-Contact Encapsulated Microball Bearing Using an Integrated Microturbine , 2009, Journal of Microelectromechanical Systems.

[10]  Peter C. Y. Chen,et al.  A micromanipulation system with dynamic force-feedback for automatic batch microinjection , 2007 .

[11]  Ding Jianning,et al.  Fabrication and temperature coefficient compensation technology of low cost high temperature pressure sensor , 2005 .

[12]  Yulong Zhao,et al.  A Novel Integrated Multifunction Micro-Sensor for Three-Dimensional Micro-Force Measurements , 2012, Sensors.

[13]  Z. S. Spakovszky,et al.  Scaling Laws for Ultra-Short Hydrostatic Gas Journal Bearings , 2003 .

[14]  Chao Meng,et al.  Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS) , 2009, Sensors.

[15]  Michel Fillon,et al.  Experimental measurement of the friction torque on hydrodynamic plain journal bearings during start-up , 2011 .

[16]  F. F. Ling,et al.  Hydrodynamic Performance of Gas Microbearings , 2004 .

[17]  Hyun-Duck Kwak,et al.  Numerical prediction of slip flow effect on gas-lubricated journal bearings for MEMS/MST-based micro-rotating machinery , 2005 .

[18]  Zoltán S. Spakovszky,et al.  High-Speed Gas Bearings for Micro-Turbomachinery , 2009 .

[19]  Jost Goettert,et al.  Micro gas bearings fabricated by deep X-ray lithography , 2004 .

[20]  O. N. Tufte,et al.  Piezoresistive Properties of Silicon Diffused Layers , 1963 .

[21]  Jinqing Wang,et al.  Tribology study of reduced graphene oxide sheets on silicon substrate synthesized via covalent assembly. , 2010, Langmuir : the ACS journal of surfaces and colloids.

[22]  Peter C. Y. Chen,et al.  An integrated probe sensor for micro-force measurement , 2006 .

[23]  Kenneth S. Breuer,et al.  Low-Order Models for Very Short Hybrid Gas Bearings , 2001 .

[24]  A. Jordan,et al.  Micromechanical force sensors based on SU-8 resist , 2012 .

[25]  F. F. Ehrich,et al.  Development of High-Speed Gas Bearings for High-Power Density Microdevices , 2003 .

[26]  Stephanus Büttgenbach,et al.  Simulation, fabrication and characterization of a 3D piezoresistive force sensor , 2008 .