A silicon micromachined shock accelerometer with twin-mass-plate structure
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Yuelin Wang | Xinxin Li | Bin Xiong | Deren Lu | Zuankai Wang | Deng-Gang Zong | Yuelin Wang | Zuankai Wang | Xinxin Li | B. Xiong | Deng Zong | D. Lu
[1] Min-Hang Bao,et al. Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes , 2000 .
[2] Jaume Esteve,et al. Twin-mass accelerometer optimization to reduce the package stresses , 2000 .
[3] Turgut Meydan. Recent trends in linear and angular accelerometers , 1997 .
[4] Yuebin Ning,et al. Fabrication and characterization of high g-force, silicon piezoresistive accelerometers , 1995 .
[5] Jaume Esteve,et al. Fabrication and characterization of a twin-mass accelerometer , 1994 .
[6] Jaume Esteve,et al. Simple technology for bulk accelerometer based on bond and etch back silicon on insulator wafers , 1998 .
[7] Jian Dong,et al. Silicon micromachined high-shock accelerometers with a curved-surface-application structure for over-range stop protection and free-mode-resonance depression , 2002 .