Critical-angle x-ray transmission grating spectrometer with extended bandpass and resolving power > 10,000

A number of high priority subjects in astrophysics can be addressed by a state-of-the-art soft x-ray grating spectrometer, such as the role of Active Galactic Nuclei in galaxy and star formation, characterization of the Warm-Hot Intergalactic Medium and the missing baryon problem, characterization of halos around the Milky Way and nearby galaxies, as well as stellar coronae and surrounding winds and disks. An Explorer-scale, largearea (> 1,000 cm2), high resolving power (R =λ/Δλ > 3,000) soft x-ray grating spectrometer is highly feasible based on Critical-Angle Transmission (CAT) grating technology, even for telescopes with angular resolution of 5-10 arcsec. Still, significantly higher performance can be provided by a CAT grating spectrometer on an X-ray- Surveyor-type mission. CAT gratings combine the advantages of blazed reflection gratings (high efficiency, use of higher diffraction orders) with those of conventional transmission gratings (lowmass, relaxed alignment tolerances and temperature requirements, transparent at higher energies) with minimalmission resource requirements. They are high-efficiency blazed transmission gratings that consist of freestanding, ultra-high aspect-ratio grating bars fabricated from silicon-on-insulator (SOI) wafers using advanced anisotropic dry and wet etch techniques. Blazing is achieved through grazing-incidence reflection off the smooth grating bar sidewalls. The reflection properties of silicon are well matched to the soft x-ray band, and existing silicon CAT gratings can exceed 30% absolute diffraction efficiency, with clear paths for further improvement. Nevertheless, CAT gratings with sidewalls made of higher atomic number elements allow extension of the CAT grating principle to higher energies and larger dispersion angles, thus enabling higher resolving power at shorter wavelengths. We show x-ray data from CAT gratings coated with a thin layer of platinum using atomic layer deposition, and demonstrate efficient blazing to higher energies and much larger blaze angles than possible with silicon alone. We also report on measurements of the resolving power of a breadboard CAT grating spectrometer consisting of a Wolter-I slumped-glass focusing mirror pair from Goddard Space Flight Center and CAT gratings, performed at the Marshall Space Flight Center Stray Light Facility. Measurement of the Al Kα doublet in 18th diffraction order shows resolving power > 10,000, based on conservative preliminary analysis. This demonstrates that currently fabricated CAT gratings are compatible with the most advanced grating spectrometer instrument designs for future soft x-ray spectroscopy missions.

[1]  Mark W. Bautz,et al.  Critical-Angle Transmission Gratings for High Resolution , Large Area Soft X-ray Spectroscopy Response to NASA Solicitation NNH 11 ZDA 018 L , Concepts for the Next NASA X-ray Astronomy Mission , 2011 .

[2]  Mark L. Schattenburg,et al.  The Chandra High‐Energy Transmission Grating: Design, Fabrication, Ground Calibration, and 5 Years in Flight , 2005, astro-ph/0507035.

[3]  Dong Guan,et al.  Nanofabrication advances for high efficiency critical-angle transmission gratings , 2013, Optics & Photonics - Optical Engineering + Applications.

[4]  M. Krause,et al.  Natural widths of atomic K and L levels, Kα X‐ray lines and several KLL Auger lines , 1979 .

[5]  James Tutt,et al.  First results from a next-generation off-plane X-ray diffraction grating , 2013, 1301.5531.

[6]  Mark L. Schattenburg,et al.  Fabrication of ultrahigh aspect ratio freestanding gratings on silicon-on-insulator wafers , 2007 .

[7]  Mark L. Schattenburg,et al.  High-efficiency blazed transmission gratings for high-resolution soft x-ray spectroscopy , 2015, SPIE Optical Engineering + Applications.

[8]  Mark L. Schattenburg,et al.  Critical-angle transmission grating spectrometer for high-resolution soft x-ray spectroscopy on the International X-ray Observatory , 2010, Astronomical Telescopes + Instrumentation.

[9]  Daniel Dewey,et al.  Laboratory calibration of x-ray transmission diffraction gratings , 1994, Optics & Photonics.

[10]  An Astrophysics Experiment for Grating and Imaging Spectroscopy , 2011 .

[11]  Minseung Ahn,et al.  Blazed high-efficiency x-ray diffraction via transmission through arrays of nanometer-scale mirrors. , 2008, Optics express.

[12]  Michael A. Nowak,et al.  Ray-tracing critical-angle transmission gratings for the X-ray Surveyor and Explorer-size missions , 2016, Astronomical Telescopes + Instrumentation.

[13]  Mark L. Schattenburg,et al.  Fabrication of 200nm period blazed transmission gratings on silicon-on-insulator wafers , 2008 .

[14]  Alexander R. Bruccoleri,et al.  Fabrication process for 200 nm-pitch polished freestanding ultrahigh aspect ratio gratings , 2016 .

[15]  J. Wilms,et al.  Arcus: exploring the formation and evolution of clusters, galaxies, and stars , 2016, Optical Engineering + Applications.

[16]  Minseung Ahn,et al.  Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands. , 2011, Applied optics.

[17]  Richard D. Deslattes,et al.  Accurate measurement of Mg and Al Kα1,2 X-ray energy profiles , 1994 .

[18]  Kai-Wing Chan,et al.  Alignment and integration of thin, lightweight x-ray optics into modules , 2014, Astronomical Telescopes and Instrumentation.

[19]  Mark L. Schattenburg,et al.  Potassium hydroxide polishing of nanoscale deep reactive-ion etched ultrahigh aspect ratio gratings , 2013 .

[20]  C. Cory,et al.  New Worlds , 1966, IEEE Spectrum.

[21]  Mark L. Schattenburg,et al.  Fabrication of nanoscale, high throughput, high aspect ratio freestanding gratings , 2012 .

[22]  Simon R. Bandler,et al.  The X-ray Surveyor Mission: a concept study , 2015, SPIE Optical Engineering + Applications.

[23]  J. Jernigan,et al.  High-Resolution Observations of the Elliptical Galaxy NGC 4636 with the Reflection Grating Spectrometer on Board XMM-Newton , 2001, astro-ph/0110013.

[24]  Mark L. Schattenburg,et al.  Plasma etch fabrication of 60:1 aspect ratio silicon nanogratings with 200 nm pitch , 2010 .

[25]  Mark L. Schattenburg,et al.  Fabrication and performance of blazed transmission gratings for x-ray astronomy , 2008, Astronomical Telescopes + Instrumentation.

[26]  Marcos Bavdaz,et al.  Making the ATHENA optics using silicon pore optics , 2014, Astronomical Telescopes and Instrumentation.