The nonlinear electrostatic behavior for shaped electrode actuators
暂无分享,去创建一个
[1] S. Senturia,et al. M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures , 1997 .
[2] R. Legtenberg,et al. Static And Dynamic Properties Of Active Joints , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[3] C. Bert,et al. Application of the quadrature method to flexural vibration analysis of a geometrically nonlinear beam , 1992 .
[4] K. Petersen. Dynamic micromechanics on silicon: Techniques and devices , 1978, IEEE Transactions on Electron Devices.
[5] J. Kuang,et al. Dynamic characteristics of shaped micro-actuators solved using the differential quadrature method , 2004 .
[6] S. Tomasiello. DIFFERENTIAL QUADRATURE METHOD: APPLICATION TO INITIAL- BOUNDARY-VALUE PROBLEMS , 1998 .
[7] W. Chen,et al. The Study on the Nonlinear Computations of the DQ and DC Methods , 1999, ArXiv.
[8] E. S. Hung,et al. Extending the travel range of analog-tuned electrostatic actuators , 1999 .
[9] N. Aluru,et al. Linear, nonlinear and mixed-regime analysis of electrostatic MEMS , 2001 .
[10] R. Dutton,et al. Characterization of contact electromechanics through capacitance-voltage measurements and simulations , 1999 .
[11] Y. Hirai,et al. Study of large bending and low voltage drive electrostatic actuator with novel shaped cantilever and electrode , 1998, MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388).
[12] Xinwei Wang,et al. A NEW APPROACH IN APPLYING DIFFERENTIAL QUADRATURE TO STATIC AND FREE VIBRATIONAL ANALYSES OF BEAMS AND PLATES , 1993 .
[13] C. Bert,et al. FREE VIBRATION ANALYSIS OF TAPERED RECTANGULAR PLATES BY DIFFERENTIAL QUADRATURE METHOD: A SEMI-ANALYTICAL APPROACH , 1996 .
[14] J. Fluitman,et al. Electrostatic curved electrode actuators , 1995 .
[15] W. Chen,et al. The application of special matrix product to differential quadrature solution of geometrically nonlinear bending of orthotropic rectangular plates , 1999, ArXiv.
[16] R. Puers,et al. Electrostatic forces and their effects on capacitive mechanical sensors , 1996 .
[17] R. Bellman,et al. DIFFERENTIAL QUADRATURE: A TECHNIQUE FOR THE RAPID SOLUTION OF NONLINEAR PARTIAL DIFFERENTIAL EQUATIONS , 1972 .
[18] Electrostatic actuator with novel shaped cantilever , 2000, MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530).
[19] S. Senturia,et al. Self-consistent simulation and modelling of electrostatically deformed diaphragms , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.