Efficient 3-D simulation of complex structures

A 3-D general-purpose device simulator is presented, and issues related to its geometrical flexibility and computational efficiency are discussed. Triangular-based prismatic elements are used as building blocks for the discretization of device equations, providing a reasonable tradeoff between simplicity and geometrical flexibility. Suitable numerical techniques, including a 'local-solution' algorithm, have been implemented in order to improve the computational efficiency of the code. A general treatment has been devised to handle floating-gate devices, which allows the program to cope with complex structures, such as a dual EPROM structure. Three-dimensional and two-dimensional simulation results are compared. >

[1]  Gernot Heiser,et al.  A Comparison of Algorithms for, Large-Scale Device Simulation , 1990, Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits.

[2]  E. M. Buturla,et al.  Finite-element analysis of semiconductor devices: the FIELDAY program , 1981 .

[3]  H. Gummel,et al.  Large-signal analysis of a silicon Read diode oscillator , 1969 .

[4]  Ping Yang,et al.  SIERRA: a 3-D device simulator for reliability modeling , 1989, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[5]  Paolo Ciampolini,et al.  Adaptive mesh generation preserving the quality of the initial grid , 1989, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[6]  H. Gummel.  A self-consistent iterative scheme for one-dimensional steady state transistor calculations , 1964 .

[7]  D. Kershaw.  The incomplete Cholesky—conjugate gradient method for the iterative solution of systems of linear equations , 1978 .

[8]  Thomas D. Linton,et al.  A fast, general three-dimensional device simulator and its application in a submicron EPROM design study , 1989, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[9]  Donald G. M. Anderson.  Iterative Procedures for Nonlinear Integral Equations , 1965, JACM.

[10]  S. J. Polak,et al.  Automatic problemsize reduction for on-state semiconductor problems , 1983, IEEE Transactions on Electron Devices.

[11]  P. Sonneveld.  CGS, A Fast Lanczos-Type Solver for Nonsymmetric Linear systems , 1989 .

[12]  P. Ciampolini,et al.  Three-Dimensional Simulation of a Narrow-Width MOSFET , 1987, ESSDERC '87: 17th European Solid State Device Research Conference.

[13]  W.H.A. Schilders,et al.  Automatic problemsize reduction for on-state semiconductor problems , 1983, IEEE Transactions on Electron Devices.

[14]  W. Fichtner,et al.  /spl Omega/ - An Octree-based Mixed Element Grid Allocator For Adaptive 3d Device Simulation , 1990, Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits.