An advantage of Computed Tomography (CT) is the coordinate measurement capability of small inner structures, which are not accessible with classical measurement techniques. Using the advantages of synchrotron radiation CT measurements of parts with sizes of a few millimeters are performed at BAMline of BESSY II and are expected to be used as references for further dimensional measurements with micro CT. Previous investigations were focused on external gears, which are accessible with standard Coordinate Measurement Machines (CMMs). To obtain information about the accuracy of dimensional measurements of internal gears with CT, reference data have been measured by a tactile‐optical CMM. This information is used to evaluate the performance of the CT. In addition to the first results for the evaluation of internal gear flanks, new measurements of different gear materials (steel and zirconium dioxide) will be presented. For functional evaluation, gear flanks are a matter of particular interest. Form deviations...