A comprehensive model for sub-10 nm electron-beam patterning through the short-time and cold development
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Chao-Hsin Wu | Li-Cheng Chang | Chun Nien | Vin-Cent Su | Chieh-Hsiung Kuan | Jia-Hao Ye | Cheng-Huan Chung | V. Su | C. Kuan | C. Wu | Li-Cheng Chang | Jia-Hao Ye | Chun Nien | Cheng-Huan Chung
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