Fabrication of Nb/AlOx/Al/AlOx/Nb junctions for voltage standard applications

Abstract We present an overdamped superconductor-insulator–normal-insulator-superconductor (SINIS) junction technology for ac voltage standard applications. Modifying our standard Nb-junction process, we developed a simple process for Nb/AlO x /Al/AlO x /Nb-junction circuits. A Josephson arbitrary waveform synthesizer device which consisted of a 100-SINIS-junction array embedded in a 50 Ω coplanar waveguide was fabricated and successfully tested.

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