Characterization of CMOS-MEMS Resonant Pressure Sensors

Comprehensive characterization results of CMOS-microelectromechanical systems resonant pressure sensor are presented. We have extensively evaluated the key performance parameters of our device in terms of quality factor (<inline-formula> <tex-math notation="LaTeX">$Q$ </tex-math></inline-formula>) variations under variable conditions of temperature and pressure, characterized by Knudsen number (<inline-formula> <tex-math notation="LaTeX">$K_{n}$ </tex-math></inline-formula>). The fundamental frequency of the reported device is 104.3 kHz. Over the full-scale pressure range of 0.1 to 100 kPa and a temperature range of −10 °C to 85 °C, <inline-formula> <tex-math notation="LaTeX">$Q$ </tex-math></inline-formula> from 450 to 62.6 have been obtained. Besides, static variations of the device capacitance have been measured and analyzed with temperature to evaluate the spring softening and the pull-in effects. A nonlinearity analysis has been performed to assess the device stability. Furthermore, a statistical mismatch analysis has been carried out to determine the deviation of resonance with etching time and ascertain maximum device yield. With our in-house back-end of line metal-layer release, this sensor can be monolithically embedded in the same substrate as standard CMOS integrated circuits, resulting in a significant cost and area reduction.

[1]  Mina Rais-Zadeh,et al.  Temperature-compensated piezoelectrically actuated Lamé-mode resonators , 2014, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).

[2]  J. Madrenas,et al.  Temperature and pressure characterization of the quality factor in a CMOS-MEMS resonator , 2016, 2016 IEEE SENSORS.

[3]  Weileun Fang,et al.  Development of a CMOS MEMS pressure sensor with a mechanical force-displacement transduction structure , 2015 .

[4]  Khalid Ashraf,et al.  Temperature dependent Young's modulus and quality factor of CMOS-MEMS resonator: Modelling and experimental approach , 2016, Microelectron. Reliab..

[5]  Jordi Madrenas,et al.  CMOS-MEMS resonant pressure sensors: optimization and validation through comparative analysis , 2017 .

[6]  Xiaodong Sun,et al.  A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure , 2013, Sensors.

[7]  Henne van Heeren,et al.  MEMS - Recent Developments, Future Directions , 2007 .

[8]  Cam Nguyen,et al.  A Resonant Temperature Sensor Based on Electrical Spring Softening , 2001 .

[9]  F. Y. Kuo,et al.  Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures , 2017, IEEE Journal of the Electron Devices Society.

[10]  Hongwei Qu,et al.  Hamster female protein. A divergent acute phase protein in male and female Syrian hamsters , 1983, The Journal of experimental medicine.

[11]  Srinivas Tadigadapa,et al.  Reliability of micro-electro-mechanical systems (MEMS) , 2001, SPIE MOEMS-MEMS.

[12]  Jordi Madrenas,et al.  Experiments on the Release of CMOS-Micromachined Metal Layers , 2010, J. Sensors.

[13]  Jordi Madrenas,et al.  Optimization of parameters for CMOS MEMS resonant pressure sensors , 2015, 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP).

[14]  Jordi Madrenas,et al.  CMOS BEOL-embedded z -axis accelerometer , 2015 .

[15]  R. Berenguer,et al.  Digital output MEMS pressure sensor using capacitance-to-time converter , 2014, Design of Circuits and Integrated Systems.

[16]  Ananiah Durai Sundararajan,et al.  Elliptic Diaphragm Capacitive Pressure Sensor and Signal Conditioning Circuit Fabricated in SiGe CMOS Integrated MEMS , 2015, IEEE Sensors Journal.

[17]  Yu Hui,et al.  High Resolution Magnetometer Based on a High Frequency Magnetoelectric MEMS-CMOS Oscillator , 2015, Journal of Microelectromechanical Systems.

[18]  Kwang-Seok Yun,et al.  Woven flexible textile structure for wearable power-generating tactile sensor array , 2015 .

[19]  Thomas W. Kenny,et al.  Using the temperature dependence of resonator quality factor as a thermometer , 2007 .

[20]  Ron Lifshitz,et al.  Nonlinear Dynamics of Nanomechanical and Micromechanical Resonators , 2009 .

[21]  W. Fang,et al.  CMOS MEMS capacitive absolute pressure sensor , 2013 .

[22]  Fook Siong Chau,et al.  Effect of Pressure on Fluid Damping in MEMS Torsional Resonators with Flow Ranging from Continuum to Molecular Regime , 2008 .

[23]  H. Seppa,et al.  Nonlinear limits for single-crystal silicon microresonators , 2004, Journal of Microelectromechanical Systems.

[24]  G. Fedder,et al.  CMOS-based sensors , 2005, IEEE Sensors, 2005..

[25]  John Ojur Dennis,et al.  Fabrication and Characterization of a CMOS-MEMS Humidity Sensor , 2015, Sensors.