论文信息 - Ni-based silicides: material issues for advanced CMOS applications - 字舞流文

Ni-based silicides: material issues for advanced CMOS applications

O. Richard | J. Kittl | J. Lisoni | A. Lauwers | M. Potter | R. Lindsay | K. Maex | A. Akheyar | M. V. Dal | O. Chamirian