A novel 5-DOF high-precision compliant parallel mechanism for large-aperture grating tiling

Abstract. In combination with the advantages of parallel mechanisms and compliant mechanisms, a 5-DOF compliant parallel mechanism is designed to meet the requirements, such as large stroke, large load capacity, high precision and high stability, for a large-aperture grating tiling device. The structure and characteristics of the 5-DOF compliant parallel mechanism are presented. The kinematics of the mechanism are derived based on a pseudo-rigid-body model as well. To increase the tiling position retention stability of the mechanism, a closed-loop control system with capacitive position sensors, which are employed to provide feedback signals, is realized. A position and orientation monitoring algorithm and a single neuron adaptive full closed-loop control algorithm are proposed. Performance testing is implemented to verify the accuracy and the tiling position retention stability of the grating tiling device. The experimental results indicate that the tiling accuracy reaches 0.2 µrad per step and 20 nm per step, and the tiling position retention stability can achieve 1.2 µrad per 30 min and 35 nm per 30 min in the rotational direction and the translational direction, respectively.

[1]  F. Jing,et al.  Automatic phase-locked control of grating tiling , 2012 .

[2]  Guangbo Hao.  Design and analysis of symmetric and compact 2R1T (in-plane 3-DOC) flexure parallel mechanisms , 2017 .

[3]  J. Kelly,et al.  Large-aperture grating tiling by interferometry for petawatt chirped-pulse-amplification systems. , 2007, Optics express.

[4]  Xianwen Kong,et al.  A structure design method for compliant parallel manipulators with actuation isolation , 2016 .

[5]  Joachim Hein,et al.  Alignment of a tiled-grating compressor in a high-power chirped-pulse amplification laser system. , 2007, Applied optics.

[6]  Jianyuan Jia,et al.  A generalized model for conic flexure hinges. , 2009, The Review of scientific instruments.

[7]  Yoshiaki Kato,et al.  An array-grating compressor for high-power chirped-pulse amplification lasers (Optics Comm. 145 (1998) 367) , 1998 .

[8]  Xinbo Huang,et al.  A new generalized model for elliptical arc flexure hinges. , 2008, The Review of scientific instruments.

[9]  Yu Ge,et al.  Six-DOF micro-manipulator based on compliant parallel mechanism with integrated force sensor , 2011 .

[10]  Fei Long,et al.  Design and analysis of a novel large-aperture grating device and its experimental validation , 2013 .

[11]  Bijan Shirinzadeh,et al.  Design and control of a 6-degree-of-freedom precision positioning system , 2017 .

[12]  Nicholas G. Dagalakis,et al.  Kinematic modeling and calibration of a flexure based hexapod nanopositioner , 2013 .

[13]  I-Ming Chen,et al.  Stiffness modeling of flexure parallel mechanism , 2005 .

[14]  Jonathan B. Hopkins,et al.  Corrigendum to Synthesis of multi-degree of freedom, parallel flexure system concepts via Freedom and Constraint Topology (FACT)—Part I: Principles , 2010 .

[15]  Joachim Bunkenburg,et al.  Demonstration of coherent addition of multiple gratings for high-energy chirped-pulse-amplified lasers. , 2004, Optics letters.

[16]  Layton Carter Hale,et al.  Principles and Techniques for Designing Precision Machines , 2013 .

[17]  Zhenguo Li,et al.  Design and Experimental Testing of an Improved Large-Range Decoupled XY Compliant Parallel Micromanipulator , 2015 .

[18]  Wei Dong,et al.  A Piezo-Actuated High-Precision Flexible Parallel Pointing Mechanism: Conceptual Design, Development, and Experiments , 2014, IEEE Transactions on Robotics.

[19]  Kunioki Mima,et al.  Pulse compression and beam focusing with segmented diffraction gratings in a high-power chirped-pulse amplification glass laser system. , 2010, Optics letters.

[20]  Guangbo Hao,et al.  Design, modelling and analysis of a completely-decoupled XY compliant parallel manipulator , 2016 .

[21]  Hai-Jun Su,et al.  An Analytical Model for Calculating the Workspace of a Flexure Hexapod Nanopositioner , 2013 .

[22]  Nicolae Lobontiu,et al.  Design of Circular Cross-Section Corner-Filleted Flexure Hinges for Three-Dimensional Compliant Mechanisms , 2002 .

[23]  Hai-Jun Su,et al.  A stiffness model for control and analysis of a MEMS hexapod nanopositioner , 2014 .

[24]  Yangmin Li,et al.  Design and analysis of a novel 6-DOF redundant actuated parallel robot with compliant hinges for high precision positioning , 2010 .

[25]  Judy M. Vance,et al.  A Screw Theory Approach for the Conceptual Design of Flexible Joints for Compliant Mechanisms , 2009 .

[26]  Guangbo Hao,et al.  Determinate Design and Analytical Analysis of a Class of Symmetrical Flexure Guiding Mechanisms for Linear Actuators , 2017 .