论文信息 - Deposition of WN/sub x/C/sub y/ thin films by ALCVD/spl trade/ method for diffusion barriers in metallization - 字舞流文

Deposition of WN/sub x/C/sub y/ thin films by ALCVD/spl trade/ method for diffusion barriers in metallization

Sari Johanna Kaipio | M. Tuominen | W. Besling | Wei-min Li | S. Haukka | P. Soininen | M. Soininen | S. Smith | Kai-Erik Elers | J. Kostamo | H. Huotari