The behaviour of surfaces under ion bombardment

The processes involved when ions bombard surfaces are divided into two categories: those due to elastic collisions, i.e., sputtering and ion scattering; and those due to inelastic collisions, leading to excitation and ionization, resulting in the emission of X-rays, optical photons and electrons. The mechanisms involved in ion scattering and sputtering are reviewed in detail. The experimental energy and angular distributions of the secondary particles are considered and compared with current theories. The effect of sputtering on the erosion of surfaces and the effects of radiation blistering and radiation damage on surface topography are discussed. Considering inelastic effects due to incident ions, results for total yields, statistics of secondary electron emission, and their energy distribution are outlined. X-ray emission, including molecular X-rays and other solid state effects, are discussed. Finally optical photon emission due to de-excitation of excited atoms is treated.

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