A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head.

We present a 2D Slope measuring System based on a Stitching Shack Hartmann Optical Head (SSH-OH) aiming to perform high accuracy optical metrology for X-ray mirrors. This system was developed to perform high-accuracy automated metrology for extremely high quality optical components needed for synchrotrons or Free Electrons Lasers (FEL), EUV lithography and x-ray astronomy with slope error accuracy better than 50 nrad rms.

[1]  Frank Siewert,et al.  The Nanometer Optical Component Measuring Machine , 2008 .

[2]  W. Southwell.  Wave-front estimation from wave-front slope measurements , 1980 .

[3]  François Polack,et al.  Latest metrology results with the SOLEIL synchrotron LTP , 2005, SPIE Optics + Photonics.

[4]  James H. Burge,et al.  Scanning pentaprism measurements of off-axis aspherics II , 2009, Optical Engineering + Applications.

[5]  R. Shack,et al.  History and principles of Shack-Hartmann wavefront sensing. , 2001, Journal of refractive surgery.

[6]  T. Ishikawa,et al.  Breaking the 10 nm barrier in hard-X-ray focusing , 2010 .

[7]  Xavier Levecq,et al.  Surface metrology with a stitching Shack-Hartmann profilometric head , 2007, SPIE Optical Metrology.

[8]  Shinan Qian,et al.  The penta‐prism LTP: A long‐trace‐profiler with stationary optical head and moving penta prism (abstract)a) , 1995 .

[9]  Xavier Levecq,et al.  A Shack-Hartmann measuring head for the two-dimensional characterization of X-ray mirrors. , 2008, Journal of synchrotron radiation.

[10]  Hidekazu Mimura,et al.  One-dimensional Wolter optics with a sub-50 nm spatial resolution. , 2010, Optics letters.

[11]  Frank Siewert,et al.  The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability , 2010 .

[12]  Frank Siewert,et al.  Advanced metrology: an essential support for the surface finishing of high performance x-ray optics , 2005, SPIE Optics + Photonics.

[13]  K. Kaznatcheev,et al.  Current status of the NSLS-II optical metrology laboratory , 2013 .

[14]  Valeriy V. Yashchuk,et al.  Development of a high-performance gantry system for a new generation of optical slope measuring profilers , 2012 .

[15]  Shinan Qian,et al.  Design of multiple-function long trace profiler , 2007 .

[16]  Garth J. Williams,et al.  Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry. , 2012, Optics express.

[17]  James H. Burge,et al.  Applications of subaperture stitching interferometry for very large mirrors , 2012, Other Conferences.

[18]  Peter Z. Takacs,et al.  Design Of A Long Trace Surface Profiler , 1987, Photonics West - Lasers and Applications in Science and Engineering.

[19]  T. Ishikawa,et al.  Efficient focusing of hard x rays to 25nm by a total reflection mirror , 2007 .

[20]  James H. Burge,et al.  Swing arm optical CMM for aspherics , 2009, Optical Engineering + Applications.

[21]  James H. Burge,et al.  Scanning pentaprism measurements of off-axis aspherics , 2008, Astronomical Telescopes + Instrumentation.

[22]  T. Ishikawa,et al.  Focusing of X-ray free-electron laser pulses with reflective optics , 2012, Nature Photonics.

[23]  Paul Dumas,et al.  An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces , 2003, SPIE Optics + Photonics.

[24]  Jana Buchheim,et al.  Characterization and calibration of 2nd generation slope measuring profiler , 2010 .