论文信息 - Influence of He/D2 plasma fluxes on the morphology and crystallinity of tungsten coatings - 字舞流文

Influence of He/D2 plasma fluxes on the morphology and crystallinity of tungsten coatings

J. Kozlova | I. Jõgi | M. Laan | H. Mändar | G. Temmerman | J. Likonen | K. Bystrov | A. Hakola | P. Paris | M. Aints | A. Lissovski | G. De Temmerman | K. Piip