论文信息 - Monitoring of the Fabrication Process of Silicon Strip Sensors for Large Scale Productions

Monitoring of the Fabrication Process of Silicon Strip Sensors for Large Scale Productions

The Compact Muon Solenoid (CMS) is one of the experiments at the Large Hadron Collider (LHC) currently under construction at CERN. Its inner tracking system consists of the world’s largest Silicon Strip Tracker (SST) which implements around 25000 silicon sensors covering an area of 200 m 2 . The CMS collaboration developed a detailed quality assurance scheme in order to ensure the functionality of all these sensors for the full LHC lifetime. After explaining the basic elements of the quality assurance program the measurements performed on the sensors and on dedicated test structures will be presented. During the production several severe problems were identified and eventually solved in cooperation with the manufacturing companies. Results from these measurements will be shown.

T. Bergauer | T. Bergauer

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