论文信息 - Fundamentals of Microfabrication

Fundamentals of Microfabrication

Road Map .- Lithography .- Pattern Transfer: Dry Etching, Deposition, and Doping .- Wet Bulk Micromachining .- Dry Bulk Micromachining .- Surface Micromachining .- LIGA .- Alternative Micromachining Technologies .- Electronics Used with Micromachined Devices .- Bonding and Packaging .- Quantum Structures and Molecular Engineering .- Appendices.-

Marc Madou | M. Madou

[1] Jack W. Judy,et al. Magnetic microactuation of polysilicon flexure structures , 1995 .

[2] Y. Tai,et al. Surface micromachined mechanisms and micromotors , 1991 .

[3] Bumkyoo Choi,et al. Fabrication and testing of the planar magnetic micromotor , 1991 .

[4] M. Allen,et al. A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[5] K.E. Petersen,et al. Silicon as a mechanical material , 1982, Proceedings of the IEEE.