Low-cost LSI development method with PC: proposition of desk top TEG

In this paper, a low-cost highly accurate LSI development method by use of PC is described. This method named Desk Top TEG provides efficient LSI design environments for simulation modules considering process dispersion on a wafer to make more accurate diagnosis. This method was applied to sputter deposition process. The process dispersion depending on the position has been estimated. Keyword: LSI, EDA, Computer Simulation