Chemical modification of Si3N4 atomic force microscopy tips was performed by a mild pretreatment using ozone and alkaline/acid solutions and subsequent formation of self-assembled monolayers (SAMs) with two kinds of ω-alkenyltrichlorosilanes (CH2CH(CH2)nSiCl3, n = 4, 9; HTS and UTS, respectively). Hydroboration of their vinyl groups gave hydroxyl-terminated SAMs. The extent of SAM formation was assessed by determining the adhesion between Si3N4 tips on one hand and bare mica or mica substrates covered with UTS SAMs on the other hand. All adhesion forces were determined with the samples immersed in water to eliminate effects of capillary forces. Contact angles on analogously treated planar Si3N4 substrates were measured for comparison. Proper conditions for SAM formation on Si3N4 tips were found to be similar to those for formation of SAMs on Si3N4 substrates, as shown by the good temporal correlation between the adhesion forces observed between UTS-modified tips and mica and the contact angles of water on...