MEMS Enabled Miniature Two-Photon Microscopy for Biomedical Imaging

Over the last decade, two-photon microscopy (TPM) has been the technique of choice for in vivo noninvasive optical brain imaging for neuroscientific study or intra-vital microendoscopic imaging for clinical diagnosis or surgical guidance because of its intrinsic capability of optical sectioning for imaging deeply below the tissue surface with sub-cellular resolution. However, most of these research activities and clinical applications are constrained by the bulky size of traditional TMP systems. An attractive solution is to develop miniaturized TPMs, but this is challenged by the difficulty of the integration of dynamically scanning optical and mechanical components into a small space. Fortunately, microelectromechanical systems (MEMS) technology, together with other emerging micro-optics techniques, has offered promising opportunities in enabling miniaturized TPMs. In this paper, the latest advancements in both lateral scan and axial scan techniques and the progress of miniaturized TPM imaging will be reviewed in detail. Miniature TPM probes with lateral 2D scanning mechanisms, including electrostatic, electromagnetic, and electrothermal actuation, are reviewed. Miniature TPM probes with axial scanning mechanisms, such as MEMS microlenses, remote-focus, liquid lenses, and deformable MEMS mirrors, are also reviewed.

[1]  Sina Faraji Alamouti,et al.  A MEMS-Based Optical Scanning System for Precise, High-Speed Neural Interfacing , 2021, IEEE Journal of Solid-State Circuits.

[2]  Thomas D. Wang,et al.  Multi-photon 3D imaging with an electrothermal actuator with low thermal and inertial mass , 2021 .

[3]  Heping Cheng,et al.  Miniature two-photon microscopy for enlarged field-of-view, multi-plane and long-term brain imaging , 2021, Nature Methods.

[4]  C. Ji,et al.  Design optimization of a 6.4 mm-diameter electromagnetic 2D scanning micromirror. , 2020, Optics express.

[5]  Huikai Xie,et al.  A MEMS lens scanner based on serpentine electrothermal bimorph actuators for large axial tuning. , 2020, Optics express.

[6]  Huikai Xie,et al.  A Customized Two Photon Fluorescence Imaging Probe Based on 2D scanning MEMS Mirror Including Electrothermal Two-Level-Ladder Dual S-Shaped Actuators , 2020, Micromachines.

[7]  Laura Waller,et al.  A micromirror array with annular partitioning for high-speed random-access axial focusing , 2020, Light, science & applications.

[8]  Shujing Liu,et al.  Cortical Plasticity Induced by Anodal Transcranial Pulsed Current Stimulation Investigated by Combining Two-Photon Imaging and Electrophysiological Recording , 2019, Front. Cell. Neurosci..

[9]  Xiaoyang Zhang,et al.  An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability , 2019, Micromachines.

[10]  Soyoung Lee,et al.  Lissajous Scanning Two-photon Endomicroscope for In vivo Tissue Imaging , 2019, Scientific Reports.

[11]  P. Kelly,et al.  In Vivo Two Photon Imaging of Astrocytic Structure and Function in Alzheimer’s Disease , 2018, Front. Aging Neurosci..

[12]  Gregory L. Futia,et al.  Three dimensional two-photon brain imaging in freely moving mice using a miniature fiber coupled microscope with active axial-scanning , 2018, Scientific Reports.

[13]  W. Piyawattanametha,et al.  2-D MEMS Scanner for Handheld Multispectral Dual-Axis Confocal Microscopes , 2018, Journal of Microelectromechanical Systems.

[14]  Huikai Xie,et al.  Modelling and Experimental Verification of Step Response Overshoot Removal in Electrothermally-Actuated MEMS Mirrors , 2017, Micromachines.

[15]  Claire Lefort,et al.  A review of biomedical multiphoton microscopy and its laser sources , 2017 .

[16]  Heping Cheng,et al.  Fast high-resolution miniature two-photon microscopy for brain imaging in freely behaving mice , 2017, Nature Methods.

[17]  Ming-Jun Li,et al.  Nonlinear optical endomicroscopy for label-free functional histology in vivo , 2017, Light: Science & Applications.

[18]  Haijun Li,et al.  An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy , 2017, Micromachines.

[19]  Zheng You,et al.  Large-Aperture kHz Operating Frequency Ti-alloy Based Optical Micro Scanning Mirror for LiDAR Application , 2017, Micromachines.

[20]  Nicholas A. Vickers,et al.  Extended depth-of-field microscopy with a high-speed deformable mirror. , 2017, Optics letters.

[21]  Thomas D. Wang,et al.  Axial beam scanning in multiphoton microscopy with MEMS-based actuator. , 2017, Optics express.

[22]  Christian Chunzi Archer-Zhang,et al.  Dynamic performance of microelectromechanical systems deformable mirrors for use in an active/adaptive two-photon microscope , 2016, Journal of biomedical optics.

[23]  Jeremy Freeman,et al.  Technologies for imaging neural activity in large volumes , 2016, Nature Neuroscience.

[24]  Michael Z. Lin,et al.  Genetically encoded indicators of neuronal activity , 2016, Nature Neuroscience.

[25]  James Yang,et al.  UAV-borne lidar with MEMS mirror-based scanning capability , 2016, Defense + Security.

[26]  Chenglin Gu,et al.  Ultrafast axial scanning for two-photon microscopy via a digital micromirror device and binary holography. , 2016, Optics letters.

[27]  Xiaoyang Zhang,et al.  Wide-angle structured light with a scanning MEMS mirror in liquid. , 2016, Optics express.

[28]  Nicolas Andreff,et al.  Scanning Micromirror Platform Based on MEMS Technology for Medical Application , 2016, Micromachines.

[29]  Flavie Braud,et al.  Development of a real-time flexible multiphoton microendoscope for label-free imaging in a live animal , 2015, Scientific Reports.

[30]  Liang Zhou,et al.  A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph , 2015, Micromachines.

[31]  Aron Michael,et al.  Piezoelectric micro-lens actuator , 2015 .

[32]  Haijun Li,et al.  MEMS-based multiphoton endomicroscope for repetitive imaging of mouse colon. , 2015, Biomedical optics express.

[33]  Randy A Bartels,et al.  A pragmatic guide to multiphoton microscope design. , 2015, Advances in optics and photonics.

[34]  Robert H. Cormack,et al.  Miniaturized fiber-coupled confocal fluorescence microscope with an electrowetting variable focus lens using no moving parts. , 2015, Optics letters.

[35]  Matthias Imboden,et al.  Electrothermally actuated tip-tilt-piston micromirror with integrated varifocal capability. , 2015, Optics express.

[36]  Hans Zappe,et al.  Varifocal MOEMS fiber scanner for confocal endomicroscopy. , 2014, Optics express.

[37]  David G. Rosenegger,et al.  A High Performance, Cost-Effective, Open-Source Microscope for Scanning Two-Photon Microscopy that Is Modular and Readily Adaptable , 2014, PloS one.

[38]  Xiaoyang Zhang,et al.  MEMS-BASED 3D CONFOCAL SCANNING MICROENDOSCOPE USING MEMS SCANNERS FOR BOTH LATERAL AND AXIAL SCAN. , 2014, Sensors and actuators. A, Physical.

[39]  Dae-Gab Gweon,et al.  Fiber-optic raster scanning two-photon endomicroscope using a tubular piezoelectric actuator , 2014, Journal of biomedical optics.

[40]  Xiaojing J Zhang,et al.  Magnetic-Actuated Stainless Steel Scanner for Two-Photon Hyperspectral Fluorescence Microscope , 2014, Journal of Microelectromechanical Systems.

[41]  P. So,et al.  Thermomechanical Actuator-Based Three-Axis Optical Scanner for High-Speed Two-Photon Endomicroscope Imaging , 2014, Journal of microelectromechanical systems.

[42]  Zhen Qiu,et al.  Modeling and Simulation of a Parametrically Resonant Micromirror With Duty-Cycled Excitation , 2014, Journal of Microelectromechanical Systems.

[43]  Martin J. Booth,et al.  Adaptive optical microscopy: the ongoing quest for a perfect image , 2014, Light: Science & Applications.

[44]  H. Urey,et al.  MEMS Laser Scanners: A Review , 2014, Journal of Microelectromechanical Systems.

[45]  A. Zheltikov,et al.  Blu-ray disk lens as the objective of a miniaturized two-photon fluorescence microscope. , 2013, Optics express.

[46]  Christine Grienberger,et al.  Imaging Calcium in Neurons , 2012, Neuron.

[47]  Harald Schenk,et al.  Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications , 2012, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[48]  O. Paulsen,et al.  Aberration-free three-dimensional multiphoton imaging of neuronal activity at kHz rates , 2012, Proceedings of the National Academy of Sciences.

[49]  D. Kobat,et al.  In vivo two-photon microscopy to 1.6-mm depth in mouse cortex. , 2011, Journal of biomedical optics.

[50]  M. Blum,et al.  Compact optical design solutions using focus tunable lenses , 2011, Optical Systems Design.

[51]  Anne E. West,et al.  Mechanisms of specificity in neuronal activity-regulated gene transcription , 2011, Progress in Neurobiology.

[52]  Benjamin F. Grewe,et al.  Fast two-layer two-photon imaging of neuronal cell populations using an electrically tunable lens , 2011, Biomedical optics express.

[53]  Huikai Xie,et al.  A Millimeter-Tunable-Range Microlens for Endoscopic Biomedical Imaging Applications , 2010, IEEE Journal of Quantum Electronics.

[54]  Hakan Urey,et al.  Comb-Actuated Resonant Torsional Microscanner With Mechanical Amplification , 2010, Journal of Microelectromechanical Systems.

[55]  Timothy D. Soper,et al.  Scanning fiber endoscopy with highly flexible, 1 mm catheterscopes for wide‐field, full‐color imaging , 2010, Journal of biophotonics.

[56]  Yutaka Abe,et al.  Electromagnetically Driven 2-axis Optical Beam Steering MEMS Mirror and Its Dependence of Actuation on Magnetic Field , 2010 .

[57]  Olav Solgaard,et al.  In vivo brain imaging using a portable 2.9 g two-photon microscope based on a microelectromechanical systems scanning mirror. , 2009, Optics letters.

[58]  Huikai Xie,et al.  An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs , 2009, Journal of Microelectromechanical Systems.

[59]  Woonggyu Jung,et al.  Design and implementation of fiber-based multiphoton endoscopy with microelectromechanical systems scanning. , 2009, Journal of biomedical optics.

[60]  Xingde Li,et al.  Scanning fiber-optic nonlinear endomicroscopy with miniature aspherical compound lens and multimode fiber collector. , 2009, Optics letters.

[61]  Fritjof Helmchen,et al.  Two-Photon Functional Imaging of Neuronal Activity , 2009 .

[62]  David Kleinfeld,et al.  In Vivo Two-Photon Laser Scanning Microscopy with Concurrent Plasma-Mediated Ablation Principles and Hardware Realization , 2009 .

[63]  A. Borst,et al.  A genetically encoded calcium indicator for chronic in vivo two-photon imaging , 2008, Nature Methods.

[64]  Huikai Xie,et al.  A large vertical displacement electrothermal bimorph microactuator with very small lateral shift , 2008 .

[65]  W. Piyawattanametha,et al.  Miniaturized probe for femtosecond laser microsurgery and two-photon imaging. , 2008, Optics express.

[66]  Jianping Su,et al.  Miniaturized probe based on a microelectromechanical system mirror for multiphoton microscopy. , 2008, Optics letters.

[67]  Min Gu,et al.  Fast handheld two-photon fluorescence microendoscope with a 475 μm × 475 μm field of view for in vivo imaging , 2008 .

[68]  F. Helmchen,et al.  Ultra-compact fiber-optic two-photon microscope for functional fluorescence imaging in vivo. , 2008, Optics express.

[69]  Nanguang Chen,et al.  A two axes scanning SOI MEMS micromirror for endoscopic bioimaging , 2008 .

[70]  Brett E Bouma,et al.  Two-axis magnetically-driven MEMS scanning catheter for endoscopic high-speed optical coherence tomography. , 2007, Optics express.

[71]  D. Tank,et al.  Imaging Large-Scale Neural Activity with Cellular Resolution in Awake, Mobile Mice , 2007, Neuron.

[72]  W. Piyawattanametha,et al.  Two-Dimensional MEMS Scanner for Dual-Axes Confocal Microscopy , 2007, Journal of Microelectromechanical Systems.

[73]  Wibool Piyawattanametha,et al.  Two-axis MEMS Scanning Catheter for Ultrahigh Resolution Three-dimensional and En Face Imaging. , 2007, Optics express.

[74]  A. Yalçinkaya,et al.  Two-axis electromagnetic microscanner for high resolution displays , 2006, Journal of Microelectromechanical Systems.

[75]  Olav Solgaard,et al.  Fast-scanning two-photon fluorescence imaging based on a microelectromechanical systems two- dimensional scanning mirror. , 2006, Optics letters.

[76]  K. Svoboda,et al.  Principles of Two-Photon Excitation Microscopy and Its Applications to Neuroscience , 2006, Neuron.

[77]  L. Fu,et al.  Integration of a double-clad photonic crystal fiber, a GRIN lens and a MEMS mirror for nonlinear optical microscopy , 2006 .

[78]  L. Fu,et al.  Nonlinear optical endoscopy based on a double-clad photonic crystal fiber and a MEMS mirror. , 2006, Optics express.

[79]  A. Geisberger,et al.  Techniques in MEMS Microthermal Actuators and Their Applications , 2006 .

[80]  M.C. Wu,et al.  Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators , 2005, Journal of Microelectromechanical Systems.

[81]  W. Denk,et al.  Deep tissue two-photon microscopy , 2005, Nature Methods.

[82]  E. Cocker,et al.  Fiber-optic fluorescence imaging , 2005, Nature Methods.

[83]  Ling Fu,et al.  Nonlinear optical microscopy based on double-clad photonic crystal fibers. , 2005, Optics express.

[84]  A. Mehta,et al.  In vivo mammalian brain imaging using one- and two-photon fluorescence microendoscopy. , 2004, Journal of neurophysiology.

[85]  D. McCormick,et al.  Gimbal-less monolithic silicon actuators for tip-tilt-piston micromirror applications , 2004, IEEE Journal of Selected Topics in Quantum Electronics.

[86]  G. Fedder,et al.  A two-axis electrothermal micromirror for endoscopic optical coherence tomography , 2004, IEEE Journal of Selected Topics in Quantum Electronics.

[87]  Luke P. Lee,et al.  Micromachined transmissive scanning confocal microscope. , 2004, Optics letters.

[88]  W. Webb,et al.  Nonlinear magic: multiphoton microscopy in the biosciences , 2003, Nature Biotechnology.

[89]  Gary K. Fedder,et al.  A CMOS-MEMS mirror with curled-hinge comb drives , 2003 .

[90]  P. Russell,et al.  Enhanced two-photon biosensing with double-clad photonic crystal fibers. , 2003, Optics letters.

[91]  Hiroshi Miyajima,et al.  A MEMS electromagnetic optical scanner for a commercial confocal laser scanning microscope , 2003 .

[92]  C. R. Giles,et al.  Beam-steering micromirrors for large optical cross-connects , 2003 .

[93]  W. Webb,et al.  Spatial profiles of store‐dependent calcium release in motoneurones of the nucleus hypoglossus from newborn mouse , 2003, The Journal of physiology.

[94]  O. Albert,et al.  Adaptive correction of depth‐induced aberrations in multiphoton scanning microscopy using a deformable mirror , 2002, Journal of microscopy.

[95]  D. Tank,et al.  A Miniature Head-Mounted Two-Photon Microscope High-Resolution Brain Imaging in Freely Moving Animals , 2001, Neuron.

[96]  Larry J. Hornbeck,et al.  The DMD^TM Projection Display Chip: A MEMS-Based Technology , 2001 .

[97]  Y. Tai,et al.  Micromachined electromagnetic scanning mirrors , 1997 .

[98]  D W Tank,et al.  Direct Measurement of Coupling Between Dendritic Spines and Shafts , 1996, Science.

[99]  K. Najafi,et al.  Vertical comb array microactuators , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[100]  Alex Dommann,et al.  Biaxial scanning mirror activated by bimorph structures for medical applications , 1992 .

[101]  W. Denk,et al.  Two-photon laser scanning fluorescence microscopy. , 1990, Science.

[102]  William C. Tang,et al.  Electrostatic-comb drive of lateral polysilicon resonators , 1990 .

[103]  Kurt E. Petersen,et al.  Silicon Torsional Scanning Mirror , 1980, IBM J. Res. Dev..

[104]  Maria Goeppert-Mayer Über Elementarakte mit zwei Quantensprüngen , 1931 .