The hydrid model for SAW filter

The design, modeling, fabrication and characterization of SAW filter are presented. The hybrid model is proposed and has a good agreement with measurement. This model would be helpful to design SAW filter that takes into account the distance between two IDTs, and therefore, is also helpful for design SAW based pressure sensor in which the applied pressure will change the distance between two IDTs.

[1]  Colin Campbell,et al.  Surface Acoustic Wave Devices for Mobile and Wireless Communications , 1998 .

[2]  H. M. Gerard,et al.  Analysis of Interdigital Surface Wave Transducers by Use of an Equivalent Circuit Model , 1969 .

[3]  M. Aguilar,et al.  Influence of sputtering mechanisms on the preferred orientation of aluminum nitride thin films , 2003 .

[4]  M. Aguilar,et al.  Effect of particle bombardment on the orientation and the residual stress of sputtered AlN films for SAW devices , 2004, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[5]  W. P. Mason Electromechanical transducers and wave filters , 1942 .

[6]  T. L. Bagwell,et al.  Polyimide as an acoustic absorber for high frequency SAW applications , 1988, IEEE 1988 Ultrasonics Symposium Proceedings..

[7]  M. Zaghloul,et al.  Modeling and Fabrication of CMOS Surface Acoustic Wave Resonators , 2007, IEEE Transactions on Microwave Theory and Techniques.

[8]  K. Nakamura,et al.  A simple equivalent circuit for interdigital transducers based on the coupled-mode approach , 1993, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[9]  C. Elachi,et al.  Waves in active and passive periodic structures: A review , 1976, Proceedings of the IEEE.

[10]  K. Nakamura,et al.  A simple equivalent circuit for interdigital transducers based on the coupled-mode approach , 1991, IEEE 1991 Ultrasonics Symposium,.

[11]  D. Hauden,et al.  Lamb waves pressure sensor using an AlN/Si structure , 1993 .

[12]  O. Tigli,et al.  A Novel Saw Device in CMOS: Design, Modeling, and Fabrication , 2007, IEEE Sensors Journal.

[13]  Michael J. Vellekoop,et al.  An acoustic absorption film for SAW devices , 1991 .

[14]  R. Weigel,et al.  Optimized design and fabrication of a wireless pressure and temperature sensor unit based on SAW transponder technology , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).