Beitrag zur Entwicklung nanoskaliger Kalibriersysteme

This dissertation deals with the basics of compact calibration systems for nanometer scale applications. They serve as standards for flexible static and dynamic calibrations of length measurement systems such as scanning probe microscopes, tactile and non-tactile probes, and roughness measurement devices. With its ability to change in height, the calibration system described in this dissertation allows not only for the calibration of static parameters, but can also be used for the calibration of dynamic parameters. It consists of a positioning stage to position a feature that can be probed by the calibrated device as well as a length measurement system traceable to the national standard. Requirements on compact calibration systems as well as a prototype of a suitable calibration system are presented. Using a new type of fringe-counting laser interferometer to measure both length and angle, the prototype yields outstanding resolutions and low measurement uncertainties. Additional relevant components are hardware and software data processing systems as well as the MATLAB user interface. The calibration system prototype that has been built within the scope of this dissertation has been used for calibrations of a scanning probe microscope and an inductive tactile probe to show both static and dynamic calibration capabilities. While a first positioning stage features a size of 50 mm x 60 mm x 50 mm, the size of a second one has been reduced to 50 mm x 50 mm x 25 mm. It complies to all requirements on flexible nanoscale calibration systems. The calibration systems' measurement uncertainties at short-term measurements are u_c=3,4 nm and u_c=0,81 nm, respectively. It can therefore be used as a supplement as well as a substitution for common calibration standards in nanometrology to solve numerous calibration tasks.