Design and simulation of MEMS based 5-DOF tactile force sensor

This paper describes design and simulation of five degrees of freedom (5-DOF) Micro-Electro-Mechanical systems (MEMS) based tactile force sensor. Tactile sensing involves with measuring physical parameters such as force, temperature, etc. with the aid of physical touch. Over the past decades tactile sensors are gaining popularity over non-contact sensors in biomedical and robotic applications. Proposed sensor design with 3mm × 3mm × 300μm dimensions, has the capability to measure not only the magnitude but also the direction of the force applied. A wagon wheel spring structure was proposed, where 8 beams work as springs to relief the force applied. Behavior of these 8 beams are monitored under each loading conditions using defused piezoresistive sensing elements. A finite element analysis of structure was performed to optimize and validate the structure and Multiphysics analysis was performed to validate the working principal of the proposed sensor.

[1]  Michael Leineweber,et al.  A novel tactile sensor system for heavy-load applications based on an integrated capacitive pressure sensor , 1998 .

[2]  Veronica J. Santos,et al.  Biomimetic Tactile Sensor Array , 2008, Adv. Robotics.

[3]  A. Sarvazyan,et al.  Cost-Effective Screening for Breast Cancer Worldwide: Current State and Future Directions , 2008, Breast cancer : basic and clinical research.

[4]  M. Bao.  Chapter 5 - Piezoresistive sensing , 2000 .

[5]  Tobias Polster,et al.  Aluminum nitride based 3D, piezoelectric, tactile sensor , 2009 .

[6]  Mark H. Lee,et al.  Tactile Sensing: New Directions, New Challenges , 2000, Int. J. Robotics Res..

[8]  Aiguo Song,et al.  Design and Calibration of a Six-axis Force/torque Sensor with Large Measurement Range Used for the Space Manipulator , 2015 .

[9]  Masaru Uchiyama,et al.  Evaluation of the robot force sensor structure using singular value decomposition , 1990, Adv. Robotics.

[10]  Clarence W. de Silva,et al.  Recent advances in MEMS sensor technology – biomedical applications , 2012, IEEE Instrumentation & Measurement Magazine.

[11]  Massimo Bergamasco,et al.  A Three-Axis Force Sensor for Dual Finger Haptic Interfaces , 2012, Sensors.

[12]  Pablo Estevez,et al.  6 DOF Force and Torque Sensor for Micro-manipulation Applications , 2011 .

[13]  Lucia Beccai,et al.  Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger , 2011 .

[14]  Muhammad Azmi Ayub,et al.  Normal force calibration for optical based silicone tactile sensor , 2012 .

[15]  B. J. Kane,et al.  A traction stress sensor array for use in high-resolution robotic tactile imaging , 2000, Journal of Microelectromechanical Systems.

[16]  Nigel H. Lovell,et al.  A review of tactile sensing technologies with applications in biomedical engineering , 2012 .

[17]  Takao Someya,et al.  A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications. , 2004, Proceedings of the National Academy of Sciences of the United States of America.

[18]  Dzung Viet Dao,et al.  Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements , 2007 .

[19]  Masahiro Ohka,et al.  Thin Flexible Sheet Handling Using Robotic Hand Equipped with Three-axis Tactile Sensors , 2015 .

[20]  Wen J. Li,et al.  An integrated MEMS three-dimensional tactile sensor with large force range , 2000 .

[21]  H. B. Muhammad,et al.  Development of a Biomimetic MEMS based Capacitive Tactile Sensor , 2009 .