Integration of Single Multi-Walled Carbon Nanotube on Micro Systems

This paper presents new techniques for depositing single multi-walled carbon nanotube (MWCNT) on metal electrodes based on micro-fabrication and an electric-field-guided assembly technique. It was demonstrated that a single MWCNT can be directionally deposited across a microscale gap guided by a biased AC electric field. The biased AC method could effectively avoid the deposition of undesirable particles, and yet maintained highly ordered deposition results. A specific AC frequency component was applied to attract only desired CNTs into a gap and a DC component was used to diminish electric field significantly when the first CNT is deposited. This method can be easily combined with other micromachining process and possibly applied to batch production.Copyright © 2002 by ASME

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