Highly Adaptive Transducer Interface Circuit for Multiparameter Microsystems

A reconfigurable transducer interface circuit that combines the communication and signal conditioning necessary to link a variety of sensors and actuators to a microsystem controller is reported. The adaptive readout circuitry supports high-resolution signal acquisition from capacitive, resistive, voltage and current mode sensors with programmable control of gain and offset to match sensor range and sensitivity. The chip accommodates sensor self test and self calibration and supports several power management schemes. It provides digital and analog outputs to control actuators and a standard interface to peripheral components. The 2.2times2.2 mm CMOS chip was fabricated in 0.5-mum, 3-metal, 2-poly process, dissipates ~50 muW at 3.3 V in a typical multisensor application utilizing periodic sleep mode, and can read out a wide range of sensors with high sensitivity. A prototype microsystem with a microcontroller and MEMS pressure, humidity, and temperature sensors has been implemented to characterize interface chip performance

[1]  K. Wise,et al.  A monolithic fully-integrated vacuum-sealed CMOS pressure sensor , 2002 .

[2]  Richard B. Brown,et al.  A mixed-signal sensor interface microinstrument , 2001 .

[3]  G.K. Fedder,et al.  A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer , 2004, IEEE Journal of Solid-State Circuits.

[4]  Robert Puers,et al.  Design methods and algorithms for configurable capacitive sensor interfaces , 2005 .

[5]  E. Mackensen,et al.  Implementation of Reconfigurable Micro-Sensor Interfaces Utilizing FPAAs , 2005, IEEE Sensors, 2005..

[6]  Frank Robert Riedijk,et al.  A general circuit for resistive bridge sensors with bitstream output , 1997 .

[7]  P. D. Wilson,et al.  Universal sensor interface chip (USIC): specification and applications outline , 1996 .

[8]  C. Hierold,et al.  A pure CMOS surface micromachined integrated accelerometer , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[9]  Junwei Zhou,et al.  Communication Buses and Protocols for Sensor Networks , 2002, Sensors.

[10]  Khalil Najafi,et al.  A generic multielement microsystem for portable wireless applications , 1998, Proc. IEEE.

[11]  Xiujun Li,et al.  An accurate interface for capacitive sensors , 2002, IEEE Trans. Instrum. Meas..

[12]  Gabor C. Temes,et al.  Circuit techniques for reducing the effects of op-amp imperfections: autozeroing, correlated double sampling, and chopper stabilization , 1996, Proc. IEEE.

[13]  R. Howe,et al.  A digital readout technique for capacitive sensor applications , 1988 .

[14]  Jichun Zhang,et al.  A highly programmable sensor network interface with multiple sensor readout circuits , 2003, Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498).

[15]  James D. Meindl,et al.  Analysis, design, and performance of micropower circuits for a capacitive pressure sensor IC , 1986 .

[16]  Gerard C. M. Meijer,et al.  A Universal Transducer Interface for Capacitive and Resistive Sensor Elements , 1997 .

[17]  Khalil Najafi,et al.  A generic interface chip for capacitive sensors in low-power multi-parameter microsystems , 2000 .

[18]  K.B. Lee,et al.  Open standards for homeland security sensor networks , 2005, IEEE Instrumentation & Measurement Magazine.

[19]  R. Puers,et al.  A Multi-Purpose CMOS Sensor Interface for Low Power Applications , 1993, ESSCIRC '93: Nineteenth European Solid-State Circuits Conference.

[20]  Kensall D. Wise,et al.  Chip-Scale Integration of Data-Gathering Microsystems , 2006, Proceedings of the IEEE.

[21]  Daniele Marioli,et al.  Oscillator-based signal conditioning with improved linearity for resistive sensors , 1998, IEEE Trans. Instrum. Meas..

[22]  J.H. Smith,et al.  A 3-axis surface micromachined /spl Sigma//spl Delta/ accelerometer , 1997, 1997 IEEE International Solids-State Circuits Conference. Digest of Technical Papers.

[23]  Wilfried Elmenreich,et al.  Interface design for smart transducers , 2001, IMTC 2001. Proceedings of the 18th IEEE Instrumentation and Measurement Technology Conference. Rediscovering Measurement in the Age of Informatics (Cat. No.01CH 37188).

[24]  Xiujun Li,et al.  A smart and accurate interface for resistive sensors , 2001, IEEE Trans. Instrum. Meas..

[25]  G.C.M. Meijer,et al.  A system-level approach for the design of smart sensor interfaces , 2004, Proceedings of IEEE Sensors, 2004..

[26]  B. Boser,et al.  A monolithic surface micromachined accelerometer with digital output , 1995 .

[27]  K.D. Wise,et al.  An all-capacitive sensing chip for temperature, absolute pressure, and relative humidity , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[28]  Bertram E. Shi,et al.  IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS — I : REGULAR PAPERS , VOL . ? ? , NO . ? ? , ? ? ? ? , 2007 .

[29]  D. Brannick,et al.  An IEEE 1451 standard transducer interface chip with 12-b ADC, two 12-b DAC's, 10-kB flash EEPROM, and 8-b microcontroller , 1998 .

[30]  Joseph M. Kahn,et al.  An autonomous 16 mm/sup 3/ solar-powered node for distributed wireless sensor networks , 2002, Proceedings of IEEE Sensors.

[31]  K.D. Wise,et al.  Programmable mixed-voltage sensor readout circuit and bus interface with built-in self-test , 1999, 1999 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC. First Edition (Cat. No.99CH36278).

[32]  Christoph Hagleitner,et al.  CMOS single-chip gas detection system comprising capacitive, calorimetric and mass-sensitive microsensors , 2002, IEEE J. Solid State Circuits.

[33]  G. Fedder,et al.  A Low-Noise Low-Offset Capacitive Sensing Amplifier for a 50-g = Hz Monolithic CMOS MEMS Accelerometer , 2004 .