Comparison of SAGS I vs. SAGS II delivery systems in emerging implantation technologies

The International Fire Code has classified Subatmospheric Gas Delivery Systems (SAGS) technologies into two main categories: SAGS Type I and SAGS Type II systems. SAGS Type I delivery systems both store and deliver gases at subatmospheric pressures. An example of this technology is ATMI’s Safe Delivery Source (SDS®) adsorbent based cylinder. SAGS Type II delivery systems store fluids at high pressure and utilize mechanical devices internal to the cylinder to deliver the gas at subatmospheric pressures. Typical mechanical devices used to enable subatmospheric delivery are either set point regulators or mechanical capillary based systems. This paper focuses on how these delivery systems perform against the unique requirements of traditional beam line ion implantation as well as solar and flat panel applications. Specifically, data are provided showing the capability of these systems with respect to flow rate, residual gas left within the cylinder, and cylinder end-point flow and delivery pressure dynamics.