Investigation of microscale electromechanical technologies for continuous monitoring. Final report

Efforts are under way worldwide to integrate electronic and mechanical components on solid state devices to perform the functions of traditional sensors at the micro-scale. For example, chemical sensors have been envisioned that involve pumping air or liquid samples at small volumetric flow rates over long periods of time for continuous monitoring of environments. The mechanical components on these devices are fabricated into monolithic silicon or other solid state media. These types of devices, if proven successfully, would offer new capabilities for remote monitoring at very small size, weight, and power consumption. When coupled with micro-scale monolithic communications components, the technical option could exist for extremely small remote monitoring devices. Heretofore, little effort has been invested at the Laboratory in examining specific design problems that could capitalize on the emerging component technologies under development at both large and small computer and electronics firms worldwide. Our program involved conceptual designs and selected prototype manufacturing of three different types of micro-scale sensors that could be applied to problems in the nonproliferation mission areas.