论文信息 - Optical band engineering of metal-oxynitride based on tantalum oxide thin film fabricated via reactive gas-timing RF magnetron sputtering - 字舞流文

Optical band engineering of metal-oxynitride based on tantalum oxide thin film fabricated via reactive gas-timing RF magnetron sputtering

S. Porntheeraphat | J. Nukeaw | V. Patthanasettakul | P. Eiamchai | M. Horprathum | C. Chananonnawathorn | N. Khemasiri | A. Klamchuen | S. Jessadaluk | T. Lertvanithphol | A. Pankiew | Sirajit Vuttivong