Controllability of novel Sn/sub 0.95/Au/sub 0.05/ microbumps using interlaminated tin and gold layers for flip-chip interconnection

A flip-chip interconnection technology using novel lead-free solder microbumps with a balling temperature as low as 220 /spl deg/C is presented. Controllability of newly developed Sn/sub 0.95/Au/sub 0.05/ microbumps has been examined experimentally. By varying the bump volume and the diameter of the wettable bump electrodes, Sn/sub 0.95/Au/sub 0.05/ microbumps with heights from 11 /spl mu/m to 37 /spl mu/m were successfully fabricated with a standard deviation of 1.5 /spl mu/m. The deviation of on-chip CPW impedance from 50 /spl Omega/ was lower than 10% for nonmetallization motherboard. The smaller bumps exhibited a better performance since the degradation of reflection properties is ascribed to the bump capacitance, which was estimated 10-20 fF. Because of high process yield and good performance, the flip-chip bonding using Sn/sub 0.95/Au/sub 0.05/ microbumps of the order of 20 /spl mu/m in height may be advantageous for W-band interconnection of InP- or GaAs-based devices.

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