论文信息 - Characterization of germanium implanted Si1−xGex layer - 字舞流文

Characterization of germanium implanted Si1−xGex layer

T. Nagano | Cary Y. Yang | K. Shoji | T. Tokuyama | J. Qiao | A. Fukami | Ashawant Gupta | C. Cook | L. Toyoshiba