Subpixel edge location method proposed to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio

Abstract A subpixel edge location method based on orthogonal Jacobi–Fourier moments is proposed in this paper to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio. The effectiveness of the proposed method is proved through the performance test of a micro-hole measuring machine with optical spherical coupling probe. Test results indicate that a blind micro-hole of 400 μm in diameter can be experimentally measured at the depth of 2000 μm with a repeatability of 40 nm and an extremity resolution of 42 nm.

[1]  Tuğrul Özel,et al.  Micro-Manufacturing: Design and Manufacturing of Micro-Products , 2011 .

[2]  Dandan Liu,et al.  Subpixel edge location based on orthogonal Fourier-Mellin moments , 2008, Image Vis. Comput..

[3]  Tan Yu.  Algorithm of laser spot detection based on circle fitting , 2002 .

[4]  Jiubin Tan,et al.  Fiber deflection probing method based on micro focal-length collimation. , 2010, Optics express.

[5]  Feng Yuan,et al.  An algorithm for subpixel edge location of circular features based on Zernike moments and moment-preserving , 2010, International Conference on Image Processing and Pattern Recognition in Industrial Engineering.

[6]  Tan Jiubin.  Some Major Concern Questions in the Research of Super Precision Measuring Technique and Instrument Engineering , 2000 .

[7]  Albert J. Shih,et al.  Form measurements of micro-holes , 2007 .

[8]  John S. Wilson,et al.  Sensor Technology Handbook , 2004 .

[9]  Lei Ao,et al.  Further improvement of edge location accuracy of charge-coupled-device laser autocollimators using orthogonal Fourier-Mellin moments , 2007 .

[10]  Yi Qin,et al.  Micromanufacturing Engineering and Technology , 2015 .

[11]  Jiubin Tan,et al.  Optical fiber probe based on spherical coupling of light energy for inner-dimension measurement of microstructures with high aspect ratios. , 2011, Optics letters.

[12]  E. Peiner,et al.  Nondestructive Evaluation of Diesel Spray Holes Using Piezoresistive Sensors , 2013, IEEE Sensors Journal.

[13]  R. Mukundan,et al.  Moment Functions in Image Analysis: Theory and Applications , 1998 .

[14]  Jiubin Tan,et al.  Opto-tactile probe based on spherical coupling for inner dimension measurement , 2012 .

[15]  Tilo Pfeifer,et al.  Interferometric measurement of injection nozzles using ultra-small f iber-optical probes (Chinese Title: 利用微小光纤光学探针对喷射喷嘴的干涉测量) , 2011 .

[16]  R. Thalmann,et al.  Ultraprecision micro-CMM using a low force 3D touch probe , 2007 .

[17]  Lutz Doering,et al.  Characterization of diesel injectors using piezoresistive sensors , 2010, 2010 IEEE Sensors.

[18]  Jiubin Tan,et al.  Fiber probe for micro-hole measurement based on detection of returning light energy , 2013 .