High-quality AlN epitaxy on nano-patterned sapphire substrates prepared by nano-imprint lithography
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Weiwei Guo | Lin Lu | Chenguang He | Bowen Sheng | Fujun Xu | Bo Shen | Weiwei Guo | Z. Qin | Fujun Xu | B. Shen | B. Sheng | Xinqiang Wang | Zhixin Qin | Xinqiang Wang | Lisheng Zhang | Jiaming Wang | Mingxing Wang | Lisheng Zhang | Jiaming Wang | Chenguang He | Lin Lu | Mingxing Wang | F. Xu
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