아날로그 센서 개발 및 해석연계 성능개선

This paper describe develope of analog accelerometer with CAE analysis. In this paper, sensors case was constructed that was fixed on the vertical axis. and the case design and adjustment were based on the CAE analysis for performance improvements. most MEMS accelerometer chip is detected accelerations on the horizontal axis. but general CMS application need to detect vertical accelerations. this paper develope vertical sensing accelerometer that has resonent frequency of about 18kHz and sensitivity of about 120mV/g.