Nano Electromechanical Memory Device using Nanocrystalline Si Dots

Yoshishige Tsuchiya, Kosuke Takai, Nobuyuki Momo, Shinya Yamaguchi, Toshikazu Shimada, Satoshi Koyama, Kazuki Takashima, Yakichi Higo, Hiroshi Mizuta, and Shunri Oda Research Center for Quantum Effect Electronics, Tokyo Institute of Technology, 2-12-1, O-okayama, Meguro-ku, Tokyo 152-8552, Japan Central Research Laboratory, Hitachi Ltd., Tokyo, Japan Precision and Intelligence Laboratory, Tokyo Institute of Technology, Kanagawa, Japan Department of Physical Electronics, Tokyo Institute of Technology, Tokyo, Japan *Phone: +81-3-5734-3350 FAX: +81-3-5734-2542 E-mail: tsuchi@diana.pe.titech.ac.jp