论文信息 - Molten KOH Etching with Na2O2 Additive for Dislocation Revelation in 4H-SiC Epilayers and Substrates - 字舞流文

Molten KOH Etching with Na2O2 Additive for Dislocation Revelation in 4H-SiC Epilayers and Substrates

Y. Sugawara | Y. Ishikawa | N. Shibata | Yongzhao Yao | K. Danno | Hiroshi Suzuki | H. Saitoh | Y. Kawai | H. Suzuki