论文信息 - Effect of N 2 Plasma Treatments on Dry Etch Damage in n- and p-type GaN - 字舞流文

Effect of N 2 Plasma Treatments on Dry Etch Damage in n- and p-type GaN

A. P. Zhang | F. Ren | S. Pearton | C. Abernathy | M. Overberg | K. Mackenzie | K. Lee | B. Luo | D. G. Kent | Y. Nakagawa