Long-Range AFM Imaging with Modified Cycloid Trajectory

Atomic force microscope (AFM) is capable of constructing accurate 3-D surface profile at a nanometer resolution. This paper demonstrates the amplitude-detection mode atomic force microscopy (AM-AFM) with long-range of the modified cycloid trajectory. For this purpose, the proposed system contains three axis scanner including the hybrid xy-scanning subsystem and the z-measuring subsystem. Besides, the internal model principle-based neural network complementary sliding mode control (IMP-based NNCSMC) approach of designing controller is implemented for the xy-piezoelectric scanner to overcome some uncertainties, i.e. hysteresis and cross-coupling effect. On the other hand, the neural network complementary sliding mode control (NNCSMC) scheme is employed on controller design along the z-piezoelectric scanner to precisely trace the topography change based on amplitude feedback signals. Due to incorporating the piezoelectric leg-based long traveling range nano-positioning stage (LTRPS) in xy-plane, an accurate AFM imaging can be obtained with the modified cycloid trajectory for long-range scanning.

[1]  Axel Schneider,et al.  Two-dimensional dynamics of a quasi-static legged piezoelectric actuator , 2012 .

[2]  Ming Zhang,et al.  Neural Network Learning Adaptive Robust Control of an Industrial Linear Motor-Driven Stage With Disturbance Rejection Ability , 2017, IEEE Transactions on Industrial Informatics.

[3]  L. Fu,et al.  Lissajous Hierarchical Local Scanning to Increase the Speed of Atomic Force Microscopy , 2015, IEEE Transactions on Nanotechnology.

[4]  Ming-Li Chiang,et al.  Design of a High-speed and High-precision Hybrid Scanner with a New Path Planning Strategy Based on Spatial Entropy , 2018, 2018 Annual American Control Conference (ACC).

[5]  Li-Chen Fu,et al.  Precision Sinusoidal Local Scan for Large-Range Atomic Force Microscopy With Auxiliary Optical Microscopy , 2015, IEEE/ASME Transactions on Mechatronics.

[6]  Gerber,et al.  Atomic Force Microscope , 2020, Definitions.

[7]  Tong Guo,et al.  Development of a large-range atomic force microscope measuring system for optical free form surface characterization , 2012 .

[8]  S O R Moheimani,et al.  High-speed cycloid-scan atomic force microscopy , 2010, Nanotechnology.

[9]  C. Gerber,et al.  Imaging modes of atomic force microscopy for application in molecular and cell biology. , 2017, Nature nanotechnology.

[10]  Sean B. Andersson,et al.  Local circular scanning for autonomous feature tracking in AFM , 2015, 2015 American Control Conference (ACC).

[11]  Chun-Chieh Wang,et al.  Complementary sliding control of non-linear systems , 2002 .

[12]  Ming-Li Chiang,et al.  Modeling and Controller Design of a Precision Hybrid Scanner for Application in Large Measurement-Range Atomic Force Microscopy , 2014, IEEE Transactions on Industrial Electronics.

[13]  A. Bazaei,et al.  Combining Spiral Scanning and Internal Model Control for Sequential AFM Imaging at Video Rate , 2017, IEEE/ASME Transactions on Mechatronics.

[14]  S. O. Reza Moheimani,et al.  Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners , 2016, IEEE Transactions on Control Systems Technology.