High frequency circuits manufactured by micromachining techniques

Micromachining technology is successfully used for high frequency applications, especially for millimeter and submillimeter circuits. The aim of this paper is to shed some light on this new and very promising field and give a survey of some recent developments. A variety of planar transmission lines, antennas, tuning elements, etc., manufactured by micromachining techniques, are demonstrated.

[1]  L. Katehi,et al.  Impedance calculation for the microshield line , 1992, IEEE Microwave and Guided Wave Letters.

[2]  Gabriel M. Rebeiz,et al.  Study of a novel planar transmission line , 1991, 1991 IEEE MTT-S International Microwave Symposium Digest.

[3]  Gabriel M. Rebeiz,et al.  Micromachined circuits for millimeter- and sub-millimeter-wave applications , 1993, IEEE Antennas and Propagation Magazine.

[4]  Linda P. B. Katehi,et al.  Membrane technology (MIST-T) applied to microstrip: a 33 GHz Wilkinson power divider , 1994, 1994 IEEE MTT-S International Microwave Symposium Digest (Cat. No.94CH3389-4).

[5]  L. Katehi,et al.  Micromachined antennas with reduced effective dielectric constants , 1995, 1995 25th European Microwave Conference.

[6]  Gabriel M. Rebeiz,et al.  High performance microshield line components , 1995 .

[7]  Linda P. B. Katehi,et al.  Compact stubs for micromachined coplanar waveguide , 1995, 1995 25th European Microwave Conference.

[8]  D. Rutledge,et al.  Antennas and waveguides for far-infrared integrated circuits , 1980 .

[9]  Gabriel M. Rebeiz,et al.  Submillimeter-wave antennas on thin membranes , 1987 .

[10]  D. Rutledge.  Micro-machining in submillimeter-wave circuits , 1996, 1996 IEEE MTT-S International Microwave Symposium Digest.

[11]  J. Bryzek,et al.  Micromachines on the march , 1994, IEEE Spectrum.

[12]  Chen-Yu Chi,et al.  Design of Lange-couplers and single-sideband mixers using micromachining techniques , 1997 .