A piezoresistive GaAs pressure sensor with GaAs/AlGaAs membrane technology

This paper reports on the technology and performance of piezoresistive pressure sensors that utilize GaAs/AlGaAs membranes for pressure transduction into stress to induce resistance changes of p doped GaAs resistors. We have tested the sensor to differential pressure up to 8*104 Pa and in a temperature range of room temperature up to 433 K.