A Robust Motion Tracking Control of Piezo-Positioning Mechanism with Hysteresis Estimation

Piezoelectric actuators are the most suited actuation devices for high precision motion operations in the positioning tasks include miro/nano-positioning [1]. These actuators have unlimited motion resolution and posses some advantages such as ignorable friction, noiseless, zero backlash and easy maintenance, in comparison with the conventional actuated systems which are based on the sliding or revolute lower pairs [2].

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