Direct Probing of Nanodimensioned Oxide Multilayers with the Aid of Focused Ion Beam Milling

IO N Recent advances in complex oxide thin fi lm synthesis techniques such as pulsed laser deposition (PLD) and oxide molecular beam epitaxy have stimulated the investigation of novel electronic, magnetic, and ionic properties enabled by the fabrication of superlattices and/or specialized interfaces. [ 1–12 ] A prime example of such novel interfacial properties is the high mobility metallic state found to exist at the interfaces of LaAlO 3 (LAO)/SrTiO 3 (STO) superlattices of below four unit cell thicknesses, while both materials individually are insulating. [ 13 , 14 ]

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