Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology

1 NTT Advanced Technology Corporation 3-1 Wakamiya, Morinosato, Atsugi, Kanagawa 243-0124, Japan Phone: +81-46-270-2075 E-mail: toshifumi.konishi@ntt-at.co.jp 2 Solutions Research Laboratory, Tokyo Institute of Technology 4259-S2-14 Nagatsuta, Midori-ku, Yokohama, Kanagawa 226-8503, Japan 3 Research Center for Advanced Science and Technology, The University of Tokyo 4-6-1 Komaba, Meguro-ku, Tokyo 153-8904, Japan